Patent
Surface profiling using scanning force microscopy
Yves Martin,Jordan C. Poler,Hemantha K. Wickramasinghe +2 more
- 03 May 1993
69
TL;DR: A method and apparatus for profiling surfaces, such as sidewalls of a trench or line, using a scanning force microscope provides improved measurement accuracy by controlling the position of the tip responsive to the real-time measured local slope of the surface as mentioned in this paper.
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Abstract: A method and apparatus for profiling surfaces, such as sidewalls of a trench or line, using a scanning force microscope provides improved measurement accuracy by controlling the position of the tip responsive to the real-time measured local slope of the surface.
read more
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Citations
Patent
Scanning probe microscope suitable for observing the sidewalls of steps in a specimen and measuring the tilt angle of the sidewalls
Akitoshi Toda,Shuzo Mishima +1 more
- 05 Jun 1998
TL;DR: A probe chip suitable for observing the vertical walls of steps in a specimen includes a cantilever-like elastic member section extending from a support section, and a probe section at the free end of the elastic member Section.
32
Patent
Image reconstruction method
Gregory A. Dahlen,William Foreman +1 more
- 28 Nov 2006
TL;DR: In this paper, the shape of a probe tip is extracted from data obtained by the instrument using an algorithm based on the principle that no reconstructed image points can physically occupy the same region as the tip during imaging.
30
Patent
Force microscope and method for measuring atomic forces in multiple directions
Thomas Bayer,Johann Dr. Greschner,Martin Nonnenmacher +2 more
- 26 Jun 1996
TL;DR: In this paper, a sensor (100) is designed such that different vibration modes (transversal and torsional) can be induced individually and each mode corresponds to one force direction.
27
Patent
Light modulated detection system for atomic force microscopes
Robert S. Harp,David J. Ray +1 more
- 09 Nov 1993
TL;DR: In this paper, a scanning force microscope is provided with apparatus to modify the light source with a modulation scheme, and information relative to scanning tip motion is included in a modulated light beam which is then demodulated and filtered to recover the information in the form of a signal which corresponds to and is representative of a chosen parameter of tip motion.
27
Patent
Cantilevers for a magnetically driven atomic force microscope
Wenhai Han,Stuart Lindsay,Tianwei Jing +2 more
- 12 Sep 1996
TL;DR: In this article, a force sensing cantilever for use in a scanning probe microscope has both a top side and a bottom side, and from the bottom side extends a probe tip.
24
References
Atomic force microscope
TL;DR: The atomic force microscope as mentioned in this paper is a combination of the principles of the scanning tunneling microscope and the stylus profilometer, which was proposed as a method to measure forces as small as 10-18 N. As one application for this concept, they introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale.
13.6K
Atomic force microscope–force mapping and profiling on a sub 100‐Å scale
TL;DR: In this paper, a modified version of the atomic force microscope is introduced that enables a precise measurement of the force between a tip and a sample over a tip-sample distance range of 30-150 A.
1.5K
Patent
Atomic force microscope and method for imaging surfaces with atomic resolution
Gerd K. Bennig
- 04 Aug 1986
TL;DR: In this paper, a sharp point is brought so close to the surface of a sample (4) to be investigated that the forces occurring between the atoms at the apex of the point (5) and those at the surface cause a spring-like cantilever (7) to deflect.
214
Patent
Method to increase the speed of a scanning probe microscope
Virgil B. Elings,Peter Maivald +1 more
- 04 Dec 1989
TL;DR: In this article, a method of operating the 3D positioner to increase the speed of gathering data about a scanning area of the surface being scanned is presented, where the positioner traverses the surface from a first edge of the scanning area with the probe in a +X direction at a first rate of speed while feedback controlling and sensing the Z direction.
49
Patent
Method of measurement by scanning tunneling microscope
Shigeo Okayama,Hiroshi Tokumoto,Hiroshi Bando,Wataru Mizutani,Masayuki Shimura,Haruki Nakagawa,Masatsugu Shigeno,Kazutoshi Watanabe +7 more
- 13 Oct 1988
TL;DR: In this article, a probe is shifted at a distance where the probe and a material to be obsed are sufficiently far away from each other relative to the roughness of the material's surface.
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