Patent
Pattern transfer by solid state electrochemical stamping
Nicholas X. Fang,Placid M. Ferreira,Keng Hsu,Peter L. Schultz +3 more
- 16 Mar 2006
20
TL;DR: In this paper, an electrochemical fabrication platform for making arrays of structures and functional devices having selected nanosized and/or microsized physical dimensions, shapes and spatial orientations is presented.
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Abstract: The present invention provides an electrochemical fabrication platform for making structures, arrays of structures and functional devices having selected nanosized and/or microsized physical dimensions, shapes and spatial orientations. Methods, systems and system components of the present invention use an electrochemical stamping tool for generating patterns of relief and/or recessed features exhibiting excellent reproducibility, pattern fidelity and resolution on surfaces of solid state ionic conductors and in metal. Electrochemical stamping tools of the present invention are capable high throughput patterning of large substrate areas and, thus, enable a robust and commercially attractive manufacturing pathway to a range of functional systems and devices including nano- and micro-electromechanical systems, sensors, energy storage devices and integrated electronic circuits.
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Citations
Patent
Direct Nanoscale Patterning of Metals Using Polymer Electrolytes
Nicholas X. Fang,Placid M. Ferreira,Keng Hsu,Peter L. Schultz,Kyle E. Jacobs,Anup Kumar +5 more
- 19 May 2008
TL;DR: In this article, an electrochemical fabrication platform for making arrays of structures and functional devices having selected nanosized and/or microsized physical dimensions, shapes and spatial orientations is presented.
31
Patent
Film formation device and film formation method for forming metal film
Motoki Hiraoka,Hiroshi Yanagimoto,Yuki Sato,Takayasu Yoshioka +3 more
- 21 Feb 2013
TL;DR: In this paper, a solid electrolyte membrane (13) is arranged on a surface of an anode (11) between the anode and a substrate (B) that serves as a cathode.
30
Patent
Method of forming an array of high aspect ratio semiconductor nanostructures
Xiuling Li,Nicholas X. Fang,Placid M. Ferreira,Winston Chern,Ik Su Chun,Keng Hsu +5 more
- 14 Oct 2010
TL;DR: In this article, a surface of a stamp comprising a solid electrolyte in opposition to a conductive film disposed on a semiconductor substrate is presented, and material immediately below the conductive pattern is selectively removed from the substrate.
20
Exploiting transport of guest metal ions in a host ionic crystal lattice for nanofabrication: Cu nanopatterning with Ag2S
TL;DR: In this paper, the authors demonstrate the possibility of using the solid ionic conductor Ag2S for the fabrication of sub-100nnm features in a Cu film and evaluate the physical properties of the Cu-Ag2S interface through an electroimpedance spectroscopy study.
7
Patent
Transfer printing an epitaxial layer to a read/write head to form an integral laser
Roger L. Hipwell,Mark Ostrowski,Marcus B. Mooney,Michael James Hardy,Scott Eugene Olson,Mark Anthony Gubbins +5 more
- 19 Nov 2015
TL;DR: In this article, a mounting surface of a read/write head is prepared to receive an epitaxial layer, which is transfer printed on to the mounting surface and maintained a vertical alignment between the optical output and the waveguide.
7
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