Patent
Particle beam microscope.
Gerd Benner,Stefan Meyer,Steffen Niederberger,Dirk Preikszas +3 more
- 08 Apr 2010
15
TL;DR: In this article, a selective detection system is configured to selectively detect one of two groups of particles having traversed the object region having a ring-shaped conical configuration, i.e., unscattered or scattered by a small scattering amount.
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Abstract: A particle beam microscope includes an illumination system generating a particle beam having a ring-shaped conical configuration. A selective detection system is configured to selectively detect one of two groups of particles having traversed the object region. The first group of particles includes the particles that traversed the object region un-scattered or scattered by a small scattering amount. The second group of particles includes particles scattered in the object region by a greater scattering amount.
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Citations
Patent
X-ray detector for electron microscope
Hanno Sebastian von Harrach,Bert Freitag,Pleun Dona +2 more
- 29 Jun 2009
TL;DR: In this article, multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection for improved detection and x-rays are detected regardless of the direction of sample tilt.
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Patent
Multi mode system with a dispersion X-ray detector
Alon Litman,Efim Vinnitsky +1 more
- 25 Jan 2016
TL;DR: In this article, an energy dispersive X-ray (EDX) detector is used to scan a flat surface of the specimen by a charged particle beam that exits from a charge particle beam optics tip and propagates through an aperture of an EDX detector tip.
3
Patent
Chromatic energy filter
Ingo Hofmann
- 09 Dec 2011
TL;DR: In this article, an energy filter device for particle beams of charged particles was proposed, comprising at least one focusing device (12, 20, 27, 28, 29, 29) and at least two radiation separation devices (15, 17, 25, 30, 37, 37).
3
Patent
Method for determining beam parameters of a charge carrier beam, measuring device, and charge carrier beam device
Uwe Reisgen,Jens de Vries,Alexander Backhaus,Hans-Peter Bauer,Sebastian Ufer,Bernd Reichenberg,Thorsten Schmitz-Kempen +6 more
- 11 Mar 2013
TL;DR: In this paper, the beam parameters of a charge carrier beam, a measuring device, and a carrier beam device are determined by using a beam deflection unit (BU) and a measuring aperture.
3
Patent
Charged Particle Microscope with improved spectroscopic functionality
Cornelis Sander Kooijman,Thijs Thomas Withaar,Gerard Nicolaas Anne van Veen +2 more
- 29 Dec 2015
TL;DR: In this article, a method of examining a specimen using a spectroscopic apparatus, such as X-ray energy-dispersive spectroscopy, XRF or PIXE, is described.
3
References
Patent
Particle-optical arrangements and particle-optical systems
Dirk Preikszas,Michael Dr. Steigerwald +1 more
- 06 Aug 2003
TL;DR: There are disclosed particle-optical beam splitters providing at least three beam-manipulating regions having magnetic fields of different field strengths provided therein for at least one particle beam passing the beam splitter as mentioned in this paper.
15
Patent
Scanning transmission electron microscope
Masayuki Shimojo,M. Takeguchi,雅幸 下条,雅樹 竹口 +3 more
- 24 Apr 2007
TL;DR: In this paper, the authors proposed a transmission electron microscope that allows a sample stage holding a sample to be adjusted to be movable by a nano-drive mechanism in the Z-axis direction being an optical axis direction of an electron beam and X-axis and Y-axis directions orthogonal to each other.
14
Patent
X-ray detector and charged-particle apparatus
Isao Ochiai,Hiroyuki Shinada,Kimio Kanda +2 more
- 19 Dec 2001
TL;DR: In this article, a means for generating a first magnetic field is applied to prevent undesired charged particles from entering into the X-ray detecting element of the Xray detector, and another means is provided to cancel the magnetic filed leaked from the first means of generating magnetic field at the position of the specimen.
12
Patent
Changed particle optical imaging system
W Kunath
- 10 Aug 1972
TL;DR: In this paper, an improved system for charged particle imaging of the type having an objective lens, an annular diaphragm, and a first supplementary lens, located behind the annular caustic surface formed by rays of a hollow beam originating from the axis point in the object plane and passing through the objective lens and diaphrasm, for focusing this beam at a point on the axis.
12
Patent
Scanning charged beam particle beam microscope
Walter Hoppe
- 07 May 1973
TL;DR: In this paper, a scanning corpuscular-beam micrope is equipped with multiple annular apertures located between the beam source and the specimen on the one hand and between the specimen and the detector on the other hand.
12
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