Patent
Distinguishing foreign surface features from native surface features
Joachim Ahner,David M. Tung,Samuel Kah Hean Wong,Henry Luis Lott,Stephen Keith McLaurin,Maissarath Nassirou,Florin Zavaliche +6 more
- 19 Sep 2013
13
TL;DR: In this article, an apparatus, including a photon detector array, and a processing means configured for processing photon-detector-array signals corresponding to a first set of photons scattered from surface features of an article focused in a first focal plane and a second set of pixels scattered in a second focal plane, wherein the processing means is further configured for distinguishing foreign surface features from foreign native features of the article.
read more
Abstract: Provided herein is an apparatus, including a photon detector array; and a processing means configured for processing photon-detector-array signals corresponding to a first set of photons scattered from surface features of an article focused in a first focal plane and a second set of photons scattered from surface features of an article focused in a second focal plane, wherein the processing means is further configured for distinguishing foreign surface features of the article from foreign native features of the article.
read more
Chat with Paper
AI Agents for this Paper
Find similar papers on Google Scholar, PubMed and Arxiv
Write a critical review of this paper
Analyze citations of this paper to find unaddressed research gaps
Citations
Patent
Surface features characterization
Joachim Ahner,Stephen Keith McLaurin,Samuel Kah Hean Wong,Henry Luis Lott +3 more
- 28 Jun 2013
TL;DR: In this article, an apparatus, including a photon detector array configured to receive photons scattered from features in a surface of an article, and a characterization means for characterizing the features in the surface of the article, was presented.
16
Patent
Classification of surface features using fluoresence
Joachim Ahner,David M. Tung,Samuel Kah Hean Wong,Henry Luis Lott,Stephen Keith McLaurin,Maissarath Nassirou,Florin Zavaliche +6 more
- 19 Sep 2013
TL;DR: In this article, an apparatus, including a photon emitter configured to emit photons onto a surface of an article, a photon detector array configured to receive photons from surface features of the article; and a processing means configured for processing photon-detector-array signals corresponding to photons scattered from the surface features and photons fluoresced from the surfaces features, wherein the processing means is further configured for classifying the surface feature.
15
Patent
Reflective surfaces for surface features of an article
Joachim Ahner,David M. Tung,Stephen Keith McLaurin,Travis William Grodt +3 more
- 17 Sep 2013
TL;DR: In this article, an apparatus including a photon emitter configured for emitting photons onto a surface of an article, a first reflective surface and a second reflective surface configured to reflect the photons onto the surface of the article, and a processing means configured for processing signals from a photon detector array corresponding to photons scattered from surface features of article.
14
Patent
Chemical characterization of surface features
Joachim Ahner,Samuel Kah Hean Wong,Maissarath Nassirou,Henry Luis Lott,David M. Tung,Florin Zavaliche,Stephen Keith McLaurin +6 more
- 19 Sep 2013
TL;DR: In this article, an optical characterization device and a photon detector array are configured to sequentially receive a first set of photons from surface features of an article and a second set of photon scattered from the surface features.
13
Patent
Surface features by azimuthal angle
David M. Tung,Joachim Ahner +1 more
- 03 Dec 2013
TL;DR: In this paper, an apparatus, including a photon emitting means configured to emit photons onto a surface of an article at a number of azimuthal angles, and a processing mean configured to process photon-detector-array signals corresponding to photons scattered from surface features of the article, was presented.
13
References
Patent
Optical method and apparatus for inspecting large area planar objects
Nagaraja Rao,Patrick D. Kinney +1 more
- 14 Nov 2001
TL;DR: In this paper, an optical inspection module is provided for detecting defects on a substrate having first and second opposite planar surfaces, which includes a substrate holding position and first and measurement instruments.
280
Patent
High dynamic range optical inspection system and method
Rajeshwar Chhibber,David Willenborg +1 more
- 26 Sep 2003
TL;DR: In this paper, a high dynamic range and high precision broadband optical inspection system and method are provided for high throughput substrate inspection in which the sides, bevels and edges of the substrate may be rapidly or simultaneously inspected for defects.
276
Patent
Automated photomask inspection apparatus and method
David G Emery,Zain K. Saidin,Mark J. Wihl,Tao-Yi Fu,Marek Zywno,Damon F. Kvamme,Michael E Fein +6 more
- 11 Jul 1995
TL;DR: In this paper, a transmissive substrate is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and reflected light collection optics and detectors collect and generate signals representative of the light transmitted by the substrate as the substrate is scanned repeatedly in one axis in a serpentine pattern.
251
Patent
Apparatus and method for inspection of high component density printed circuit board
Dinyar Sepai,Kevin R Daly,Brian L Whalen,Khanh Hong,George B Jones +4 more
- 24 Jun 1994
TL;DR: In this paper, an automated electronic module inspection system consisting of two video cameras is presented, where a positioning table aligns a module-under-test with the optical axis of each camera thereby enabling the same field-of-view to be observed under different lighting conditions.
158
Patent
Opto-electronic scale-reading apparatus
William Frank Noel Stephens
- 22 Jun 1987
TL;DR: In this paper, the authors proposed a scale reading apparatus comprising a read head and a plurality of optical emitter and receiver pairs arranged so that beams of collimated light generated by the respective emitters fall on a common region (30) of a scale.
125
Related Papers (5)
Victor B. Kley
- 05 Aug 1985
Yasunori Asada,Norio Miyazato,Eiji Yamazaki +2 more
- 08 Oct 2009
Kuniaki Nagayama,Eiki Adachi +1 more
- 29 Sep 1995