Defect checking load counting system and method

TL;DR: In this article, a defect checking load counting system and method is presented, which comprises the following steps of detecting defect signals by defect detection cabinets; directly leading a wafer file out of a fixed catalog of a server through a defect detection system; performing further checking on overproof wafers with massive defects by using the defect detector cabinets; after all the defects are primarily checked by the defect detectors, automatically generating KLA files and picture files which have the same name, and transmitting the files to the defect detection systems; connecting to the corresponding cabinets to obtain all file lists corresponding

Abstract: The invention discloses a defect checking load counting system and method. The method comprises the following steps of: detecting defect signals by defect detection cabinets; directly leading a wafer file out of a fixed catalog of a server through a defect detection system; performing further checking on overproof wafers with massive defects by using the defect detection cabinets; after all the defects are primarily checked by the defect detection cabinets, automatically generating KLA files and picture files which have the same name, and transmitting the files to the defect detection system; backing up the corresponding files to the corresponding cabinets when the defect detection system correctly introduces data; connecting to the corresponding cabinets to obtain all file lists corresponding to the defect checking cabinets; resolving all pieces of information containing checking and counting information according to the file lists; and checking a database corresponding to the defect detection system to obtain a corresponding counting result. By the system and the method, the problem that the conventional defect detection system can not conveniently and accurately count loads of the defect checking cabinets.