The embodiment of the invention provides a temperature control device and method, and integrated circuit manufacturing equipment, and relates to the field of temperature control equipment. The temperature control method comprises the following steps: collecting a current temperature value PV of detected equipment; comparing the current temperature value PV with a preset temperature value SP to obtain a temperature difference value; carrying out refrigerating PID calculation and heating PID calculation on the temperature difference value to obtain a refrigerating control output value Cout1 anda heating control output value Hout1; and analyzing the heating control output value Hout1, and controlling a heating system and a refrigerating system to control the temperature of the detected equipment according to an analysis result so as to reach the preset temperature value SP. Through the simultaneous action of heating PID control and refrigeration PID control, the temperature control capability is enhanced, the temperature control precision of the equipment is greatly improved, and the temperature control precision in a no-load state is within +/-0.1 DEG C, and the temperature controlprecision in a loading state is within +/-0.5 DEG C.

Temperature control device and method, and integrated circuit manufacturing equipment

The invention provides an automatic control system and method of an environment constant-temperature constant-humidity device. The control system comprises a testing method reading module, a big datalearning library, a testing automatic control module, an automatic temperature control module, an automatic humidity control module, a cooling unit group, an electric heating group, a humidifier, an automatic report issuing module, a remote control module, a variable-frequency power supply, a tested model machine, a temperature and humidity collecting module, a data collecting module and a reportstoring module. The control method includes the following steps of S1, the data adjusting stage; S2, the temperature and humidity control stage; S3, the information updating stage; S4, the sample testing stage; S5, the testing arrangement stage. By means of machine learning and intelligent judging, the environment constant-temperature constant-humidity device is automatically controlled; by meansof the system and method, the unmanned control mode can be achieved, labor cost is saved, and the intelligent level is improved. By means of the automatic control system and method, the temperature deviation can be kept within 0.2 DEG C.

Automatic control system and method of environment constant-temperature constant-humidity device

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Automatic control system and method of environment constant-temperature constant-humidity device