The invention relates to a differential pressure sensor having a low hysteresis volume Said sensor comprises a sensor element (1), two pressure measuring chambers (21, 31) which lie adjacent to the sensor element, two pressure receiving chambers (22, 32) which are closed by separating membranes (21, 31), and two overload chambers (23, 33) which are separated by an overload membrane (6), said overload membrane (6) comprising a closed outer edge and a closed inner edge and being firmly fixed along said outer and inner edge thereof

Differential pressure sensor

For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being axially clamped between an elastic sealing ring, which bears against the membrane-bearing end face of the pressure measuring cell, and a support ring, which bears against the rear face of the pressure measuring cell, the dimensions of the support ring are coordinated with the dimensions of the sealing ring and pressure measuring cell such that a radial deformation of the membrane-bearing end face caused by the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor arising from a reduction of the axial clamping force by at least 10% amounts to not more than about 0.02%. Additionally, arranged between the support ring and a clamping ring is a stiff decoupling element, which minimizes the temperature hysteresis of the span. The geometry of the support ring and the decoupling element is determined iteratively by means of FEM.

Capacitive pressure sensor

A capacitance pressure sensor includes a pressure diaphragm, an acceleration diaphragm, and a support member. The pressure diaphragm and acceleration diaphragm each include electrodes on surfaces that face each other, thereby forming a pressure sensitive capacitor. The pressure sensitive capacitor is coupled to the support member, which is in turn directly coupled to a base plate. The structure of the pressure sensor is simplified structure in that it includes no additional stress isolation components.

Simplified capacitance pressure sensor

A force or pressure transducer is disclosed. In one embodiment, the transducer has a substrate, a dielectric material disposed on the substrate, a spacing member disposed on the dielectric material, and a resilient element disposed on the dielectric material and the spacing member. A portion of the resilient element is separated from the dielectric material, and a portion of the resilient element is in contact with the dielectric material. The contact area between the resilient element and the dielectric material varies in response to movement of the resilient element. Changes in the contact area alter the capacitance of the transducer, which can be measured by circuit means.

Micro-electromechanical sensor

A pressure sensor comprises a sensor body 1; a measuring diaphragm 4 which is held by the sensor body, can have a pressure applied to it and can be deformed on the basis of pressure; at least two resistance elements 11, 12 which have an AlxGa1-xN layer 6, wherein at least one first resistance element of the at least two resistance elements is arranged on the measuring diaphragm and has a resistance which depends on deformation. The pressure sensor can be operated using a measurement circuit for detecting a signal which depends on the resistances of the at least two resistance elements on the plane of the AlxGa1-xN layer. Four resistance elements (11, 12) are preferably provided in a full bridge.

Pressure-measuring cell

These capacitive pressure sensor cells have joints between substrates and diaphragms being both pres-sure- and/or tension-proof and high-vacuum-tight and long-term-stable. The sensor cell comprises a ceramic substrate (1) having a cylindrical surface (11), a major surfaces (12, 13). The major surface (12) includes a concave central area (121) merging, in the direction of and up to said cylindrical surface (11), into a convex surface (124) having a vertex line (125) and forming a planar ring surface (126) in its area. An electrode (122) is located in the concave area (121). An electrical connection (123) extends from electrode (122) through the substrate (1) to surface (13). A ceramic diaphragm (5) has a planar inner surface (51) on which an electrode (52) is located and which rests on the ring surface (126) of the substrate (1). The diaphragm (5) is joined to the substrate by an active brazing solder forming a circumferential wedge zone (91) in the area of the substrate between the ring surface (126) and the cylindrical surface (11). An electrical connection to the electrode (52) is made through the wedge zone (91). Respective differential pressure sensors can comprise a central substrate (2) and two outer diaphragms (61, 71) or a central diaphragm (8) and two outer substrates (3, 4).

Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same

The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor (10) has a substrate (1) and a first major surface (11), a second major surface (12) and a circumferential surface (13. A plate-shaped electrode (14) of electrically conductive material is secured in a recess (15) in the major surface (11) in a high-pressure-resistant and high-vacuum-tight manner by a joining material (16). A through connection (17) is provided from the electrode (14) through the substrate (1) to the major surface (12) or the circumferential surface (13). A diaphragm (2) of ceramic, glass, or single-crystal material is attached to the substrate (1) outside the recess (15) along a joint (18) by a joining material (26), and forms itself a further electrode or is covered, on a surface facing the electrode (14), with a further electrode (24) which is contacted through the joint (18). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms.

Capacitive pressure sensor or capacitive differential pressure sensor

The device has a base body, a membrane (30) connected to the base body via a joint, a measurement capacitor for generating a measurement signal with a first (40a) and second electrode attached to the base body or to the underside of the membrane opposite to each other, whereby a groove (26) to the measurement capacitor connects to the end of the joint in the base body.

Capacitive pressure sensor has membrane connected to base body via joint and groove to measurement capacitor connects to end of joint in base body

The differential pressure sensor has a membrane (30) between 2 blocks (20a,20b) provided with respective membrane beds (22a,22b), a pair of measuring capacitors provided by electrode pairs (40a,40b; 41a,41b), each associated with one membrane bed and the facing side of the membrane. The measuring signals from the measuring capacitors are fed to an electronic circuit calculating the differential pressure corrected for the network pressure.

Capacitive differential pressure sensor incorporates correction of calculated differential pressure for eliminating dependency on network pressure

The capacitance sensor (10) comprises a body section (1) of ceramic, glass or a single-crystal material, an electrically conductive electrode plate (14), an electrical connection (17), and a membrane (2) of ceramic, glass or a single-crystal material. The capacitance sensor (10) comprises: (i) a body section (1) of ceramic, glass or a single-crystal material; (ii) an electrically conductive electrode plate (14) which is attached within a recess (15) in a first surface of the body section, and sealed by a first joint (16) to withstand high vacuum and high pressure; (iii) an electrical connection (17), passing through the body section, from the electrode (14) to a second body surface (12), or the surrounding edge (13); and (iv) a membrane (2) of ceramic, glass or a single-crystal material, which is attached to the body section, by a second joint (26), along a joint surface (18) outside of the recess, and either itself forming a second electrode, or being covered by an electrode, facing towards/parallel to the first electrode, and which is provided with electrical contact through the jointing surface (18).

Capacitive sensor of pressure or differential pressure

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