An EUV light source is disclosed that may include a laser source, eg CO2 laser, a plasma chamber, and a beam delivery system for passing a laser beam from the laser source into the plasma chamber Embodiments are disclosed which may include one or more of the following; a bypass line may be provided to establish fluid communication between the plasma chamber and the auxiliary chamber, a focusing optic, eg mirror, for focusing the laser beam to a focal spot in the plasma chamber, a steering optic for steering the laser beam focal spot in the plasma chamber, and an optical arrangement for adjusting focal power

Laser produced plasma euv light source

An efficient single frequency fiber laser by using a newly-developed Er(3+)/Yb(3+) co-doped single mode phosphate glass fiber with the net gain coefficient of 5.2 dB/cm and propagation loss coefficient of 0.04 dB/cm has been demonstrated. Over 300 mW stable continuous -wave single transverse and longitudinal mode seed lasering at 1.5 microm has been achieved from a 2.0 cm-long active fiber. The measured slope efficiency and the calculated quantum efficiency of laser emission are found to be 30.9% and 0.938 +/- 0.081, respectively. It is found that the linewidth of the fiber laser is less than 2 kHz, and the measured relative intensity noise (RIN) is around -120 dB/Hz in the frequency range of 50 to 500 kHz.

An efficient compact 300 mW narrow-linewidth single frequency fiber laser at 1.5 microm.

An EUV light source and method of operating same is disclosed which may comprise: an EUV plasma production chamber comprising a chamber wall comprising an exit opening for the passage of produced EUV light focused to a focus point; a first EUV exit sleeve comprising a terminal end comprising an opening facing the exit opening; a first exit sleeve chamber housing the first exit sleeve and having an EUV light exit opening; a gas supply mechanism supplying gas under a pressure higher than the pressure within the plasma production chamber to the first exit sleeve chamber. The first exit sleeve may be tapered toward the terminal end opening, and may, e.g., be conical in shape comprising a narrowed end at the terminal end.

Euv light source

Judd–Ofelt analysis and improvement of thermal and optical properties of tellurite glasses by adding P2O5

An apparatus and method is disclosed which may comprise a laser produced plasma EUV system which may comprise a drive laser producing a drive laser beam (fig. 4, 172); a drive laser beam first path having a first axis; a drive laser redirecting mechanism (fig. 4, 170) transferring the drive laser beam from the first path to a second path, the second path having a second axis; an EUV collector optical element (fig. 4, 30) having a centrally located aperture; and a focusing mirror (fig. 4, 180) in the second path and positioned within the aperture and focusing the drive laser beam onto a plasma initiation site located along the second axis (fig. 4, 28). The apparatus and method may comprise the drive laser beam is produced by a drive laser having a wavelength such that focusing on an EUV target droplet of less than about 100 μm at an effective plasma producing energy if not practical in the constraints of the geometries involved utilizing a focusing lens. The drive laser may comprise a CO2 laser. The drive laser redirecting mechanism may comprise a mirror.

Lpp euv light source drive laser system

Er3+ doped boro-tellurite glasses for 1.5 mum broadband amplification

The performance of compact multimode pumped erbium-doped phosphate fiber amplifiers is presented. A fiber amplifier with a small signal net gain of 41 dB at 1535 nm and 21 dB over the full C-band is demonstrated using a newly developed 8-cm-long erbium-doped phosphate fiber excited with a 1-W, 975-nm multimode laser diode. A theoretical model is developed for the multimode pumped amplifier based on modified rate equations and an effective beam propagation method. Close agreement between experimental and modeling results is observed.

Compact multimode pumped erbium-doped phosphate fiber amplifiers

A fiber amplifier with a net gain of 43dB at 1535nm and 21dB over the full C-band was demonstrated using a newly developed 8-cm long erbium-doped phosphate fiber excited with a 1 W 975nm multimode laser diode. A theoretical model was developed for multi-mode pumped amplifier using a very short fiber.

Multi-mode pumped amplifier using a newly developed 8-cm long erbium-doped phosphate glass fiber

Popular Tasks used by Researchers

How can I help with your research?

Get more enhanced response by uploading the PDFs you want me to reference.

No relevant PDFs in your library

SciSpace is the AI research assistant for academics. Run systematic literature reviews on 280M+ papers, and write papers with cited sources. Trusted by 1M+ students, PhDs & researchers.

SciSpace | AI for Research

We encountered an error while loading the panel. Please try refreshing the page.

Something went wrong

Analyze PDFs

Code & Manuscripts

Funding & Grants

Literature & Patents

Medical & Clinical Data

Systematic Review

Visualize & Present

Web & Data

Build a Google Scholar-like website for your research.

Build a website

Create charts and images for your research

Create a Chart

Write a paper for submission to a journal

Draft a manuscript

Patent Search

Design eye-catching scientific posters in minutes.

Scientific Poster Generation

Systematic Literature Review

Anyone with the link can view this chat. You can switch it back to private anytime.

One task is running at the moment. Your messages will be shown right after.

Drag and drop or click here to browse

Loved by <highlight>1 million+</highlight> researchers

Extract a list of specific topics and their sources from unstructured text

Topics

Compare and analyze relevant papers that matches with your search

Papers

Get insights from PDFs and bookmarked papers from your library

My library

Recent searches

Try searching for:

Catch AI-generated content in scholarly and non-scholarly content

{ai} Detector

Ai Writer

Get PDF Summaries, highlighted text explanations 

Chat with PDF

Effortlessly create in-text citations and bibliographies in APA and 2,500 other formats

Citation generator

Get explanations, summaries, and answers on academic papers

Ease up your research workflow with {scispace}'s cohort of exciting AI tools

Elevate your academic writing skills and convey your ideas the way you want

Paraphraser

Explore our range of reading and writing tools

Your file is being prepared and should be ready in a few minutes. If it's a large file, it might take a bit longer. You can close this window, and we'll email you the file when it's done.

You have reached a maximum limit of <strong>{limit}</strong> columns in the table. Remove at least <strong>1</strong> column to add or create another one.

Qingyun Chen

Author Tools

Chat about Author

Papers

Er3+ doped boro-tellurite glasses for 1.5 mum broadband amplification

Compact multimode pumped erbium-doped phosphate fiber amplifiers

Multi-mode pumped amplifier using a newly developed 8-cm long erbium-doped phosphate glass fiber