A composite method for measuring gas fluid flow, comprising the steps of: (a) providing a bypass pipe astride to a mechanical device for measuring gas fluid flow with a temperature sensor and a pressure sensor, (b) providing an MEMS flowrate sensor on the bypass pipe, (c) connecting the temperature sensor, the pressure sensor, the mechanical device for measuring gas fluid flow and the MEMS flowrate sensor to a data processing system, and (d) linking the data processing system with a data display system, wherein the measured data from the temperature sensor, the pressure sensor, the mechanical device for measuring gas fluid flow and the MEMS flowrate sensor is processed by the data processing system and gas fluid flow data is displayed by the data display system.

A composite gas fluid flow measuring method and its device

PROBLEM TO BE SOLVED: To provide a servo-type volumetric flowmeter using a secondary flowmeter and capable of measuring not only gases but also high-temperature or high-pressure fluids to be measured, achieving high-speed response, and performing precise measurements, even if there are stains in the fluids to be measured. SOLUTION: The servo-type volumetric flowmeter 1 is provided with a volumetric flowmeter 2, a servo mechanism 4 including the secondary flowmeter 3, and a flow quantity transmitter 5. The volumetric flowmeter 2 is provided with a channel 12, a measuring chamber 7, and a pair of first and second rotators 8 and 9 and measures the quantity of flow, on the basis of rotations of the first and second rotators 8 and 9. The servo type volumetric flowmeter 1 is further provided with a bypass pipe 19 astride the upstream and downstream of the first and second rotators 8 and 9, a servo motor 22, and a servo mechanism 4 for controlling the servo motor 22. The servo mechanism 4 includes the thermal, ultrasonic, or volumetric secondary flowmeter 3. The secondary flowmeter 3 generates flow quantity signals for determining the flow and the flowing directions through the bypass pipe 19. COPYRIGHT: (C)2008,JPO&INPIT

Servo-type volumetric flowmeter using secondary flowmeter

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Servo-type volumetric flowmeter using secondary flowmeter