PURPOSE:To remarkably enhance the detecting sensitivity of a sensor and to manufacture the sensor with ease by integrally providing a circular pressure receiving plate via a thin cantilever having a strain gauge incorporated at an end part of the main body of the sensor. CONSTITUTION:A piezoelectric resistance element 11, a temperature compensation resistance element 12 and a peripheral circuit 13 are formed on the surface of a silicon substrate. After a protecting film is formed on the surface of the silicon substrate, the silicon substrate is processed in three dimension by anisotropic etching. Accordingly, a main body 9 of the sensor provided with the resistance element 12 and peripheral circuit 13, a canctilever 3 provided with the resistance element 11 and a pressure receiving plate 10 are formed in one body. When the fluid running inside a piping 1 hits the pressure receiving plate 10, the pressure receiving plate 10 is moved to the downstream side of the fluid. The amount of the strain of the cantilever 3 due to the movement of the pressure receiving plate 10 is measured by the resistance element 11 and output to the peripheral circuit 13. The peripheral circuit 13 operates the flow rate inside the piping 1 in accordance with a predetermined calculating formula.

Semiconductor flow rate sensor

PURPOSE:To provide the title unit so designed that both upper and lower cases are equipped with the first guide tools to make detachable through the sliding of the upper case against the lower case and the second guide tools differing in regulating the guided direction from the first guide tools, thereby ensuring the upper case to be simply detachable. CONSTITUTION:A raising case 8 within which a raising chain 14 having raising claws 13 is stored is made up with both detachable upper and lower cases 11, 12. To make up the upper case 11 so as to be detachable against the lower case 12, both the cases 11, 12 are respectively equipped with the first guide tools 19, 20 to make detachable through the sliding of the upper case 11 against the lower case 12 and the second guide tools 21, 22 differing in regulating the guided direction by ca. 90 degrees from the first guide tools 19, 20. As a result, the upper case of the raising case can be made simply detachable without the need for removing a grass dividing body as before.

Grain culm raising unit

PURPOSE:To detect the needle position on which the central axis of a needle is coincident with the central axis of the aperture of a pull-out electrode in high sensitivity and high accuracy by detecting the minimum point of the detected and amplified variation component of the beam current generated by the micro vibration of the tip portion of the needle in a constant frequency. CONSTITUTION:When an AC voltage is applied to an element electrode 13 from an oscillator 19 through a coupler 20, a piezoelectric ceramic 14 is vibrated (vibration frequency [f]) to generate micro vibration on the tip of the needle. In the voltage signal of the beam current from the needle 1 to the pull-out electrode 8 outputted from the monitor terminals of a source 10, a variation component of the frequency [f] is contained, because the relative position of the needle 1 to the pull-out electrode 8 is varied periodically with the frequency [f]. This signal of frequency [f] is passed through a band-pass filter 16, amplified with an amplifier 17 and outputted as an amplitude value Vm from an amplitude detector 18. As the Vm takes the minimum value at a point x0 on which the central axis of the needle 1 is coincident with the central axis of the aperture of the pull-out electrode 8, the alignment can be carried out precisely.

Liquid metal ion source

PROBLEM TO BE SOLVED: To make it possible to advance a current time for executing a summer time simply by operating a summer time switch once and return the current time simply by operating the summer tune switch again to cancel the summer time. SOLUTION: A current time is counted by a clock part 3. Also, a timer time set by an operation part 5 is stored at a timer part 4. When the current time at the clock part 3 reaches a timer time set by the timer part 4, a control part 1 drives a load The current time of the clock part 3 advances or lags one hour every time a summer time switch 6 is operated.

Device with timer

PURPOSE:To facilitate the connection of fine-pitch terminals by a method wherein a region, positioned facing LSI element lead terminals on a film base, is constituted of two portions, one provided with through-holes and the other not. CONSTITUTION:Through-holes 3 provided in a film base 1 are positioned facing lead terminals groups 7-1 with gasp between the terminals relatively wide as shown in the left-side portion of the figure. No through-holes or slits are provided in the other portion facing a lead terminals group 7-2 with gaps between the terminals very fine. It is so designed that, when the film base 1 is cut along lines 4, the terminals belonging to the lead terminals groups 7-1 may protrude from an edge of the film base 1 while those belong to the lead terminal groups 7-2 remain contained within the film base 1.

Film carrier lsi

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Film carrier lsi