Trends in environmental science using microscopic X-ray fluorescence

Members of the Atomic Spectrometry Updates Editorial Board take a look back over 25 years at how the subject of atomic spectrometry has changed, and how the review articles have developed to reflect this.

/pdf/atomic-spectrometry-updates-a-25-year-retrospective-3xmwrcrk87.pdf

Atomic Spectrometry Updates: A 25-year retrospective

Depth-profiling measurements by means of synchrotron radiation based grazing XRF techniques, i.e., grazing emission X-ray fluorescence (GEXRF) and grazing incidence X-ray fluorescence (GIXRF), present a promising approach for the non-destructive, sub-nanometer scale precision characterization of ultra shallow ion-implantations. The nanometer resolution is of importance with respect to actual semiconductor applications where the down-scaling of the device dimensions requires the doping of shallower depth ranges. The depth distributions of implanted ions can be deduced from the intensity dependence of the detected X-ray fluorescence (XRF) signal from the dopant atoms on either the grazing emission angle of the emitted X-rays (GEXRF), or the grazing incidence angle of the incident X-rays (GIXRF). The investigated sample depth depends on the grazing angle and can be varied from a few to several hundred nanometers. The GEXRF setup was equipped with a focusing polycapillary half-lens to allow for laterally resolved studies. The dopant depth distribution of the investigated low-energy (energy range from 1 keV up to 8 keV) P, In and Sb ion-implantations in Si or Ge wafers were reconstructed from the GEXRF data by using two different approaches, one with and one without a priori knowledge about the bell-shaped dopant depth distribution function. The results were compared to simulations and the trends predicted by theory were found to be well reproduced. The experimental GEXRF findings were moreover verified for selected samples by GIXRF.

/pdf/depth-profiling-of-low-energy-ion-implantations-in-si-and-ge-1emokcjhr6.pdf

Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssb.202000471

Grazing Emission X‐Ray Fluorescence: Novel Concepts and Applications for Nano‐Analytics

If human beings or animals repeatedly ingest plant leaves contaminated with minute quantities of hazardous metals (Pb, As, Hg, Cd, etc.), the metals will gradually accumulate in their bodies. When the quantities of the metals in the bodies reach toxic levels, they may cause serious symptoms of poisoning. Therefore, it is significant to detect and analyze the minute quantities of hazardous metals that attach to plant leaves in terms of epidemiology and disease prevention. We developed grazing exit micro X-ray fluorescence analysis (GE-μ-XRF), which was expected to analyze the localized surface of an aqueous plant leaf with a much faster and simpler sample treatment than with conventional analytical methods, to detect Pb attached to a surface of a leaf of Camellia hiemalis. A micro X-ray beam was produced by using a polycapillary X-ray lens. GE-μ-XRF is a grazing exit X-ray analysis (GE-XA) method in which X-rays emitted from only the near-surface region of a specimen are selectively detected under a grazin...

Grazing exit micro X-ray fluorescence analysis of a hazardous metal attached to a plant leaf surface using an X-ray absorber method.

A micro X-ray fluorescence analysis method using polycapillary X-ray optics and grazing exit geometry

In designing LiDAR systems for a mass market, it is desirable to scan a scene without moving parts and with optics and packaging that are robust and simple to manufacture. VCSEL arrays have already emerged in consumer LiDAR systems that reach several meters. Extending those distances requires packing higher peak optical power into narrower angular slices or blocks and addressing those electronically. Detector arrays are commonly read out line-by-line; accordingly, sources for these arrays must ideally emit power into narrow angular slices. An array arranged into narrow addressable stripes shown through a lens will do just that. We present 940nm arrays of 100 or more narrow (<0.16mm) stripes that each emit <50W peak power when driven for a few ns, <0.1% duty-cycle. The arrays have multiple anode contacts and a single backside cathode contact. Multiple light-emitting junctions enable high slope-efficiency (<4W/A) that reduces the current per channel required. Such stripe arrays may still illuminate more than one line on the detector or may require stripes so narrow as to cause high electrical resistance. For detector arrays that may be read-out in blocks with aspect ratio closer to one, we present 905nm and 940nm matrix-addressable VCSEL arrays that emit over 50W peak-power from regions < 0.06mm2 when driven with short (few ns) pulses at low (<0.1%) duty-cycle over 80oC. Such arrays have a linear array of cathode traces perpendicular to a linear array of anode traces. This arrangement permits MxN regions to be addressed with only M+N electrical contacts.

Column-addressable and matrix-addressable multi-junction VCSEL arrays for all electronic-scanning LiDAR

Polycapillary x-ray optics (capillary x-ray lens) is now popular in x-ray fluorescence (XRF) analysis. Such an x-ray lens can collect x-rays emitted from an x-ray source in a large solid angle and form a very intense x-ray microbeam which is very convenient for micro x-ray fluorescence (MXRF) analysis. In this paper, a new method called grazing exit micro x-ray fluorescence analysis (GE-MXRF), which combines an x-ray lens used to form an intense XRF source was developed and applied in multilayer film analysis. Such a method can give the information of film composition, density, and thickness. Through two-dimensional scan of the film sample, the information of film uniformity can be acquired; meanwhile, this method is also useful in adjusting experiment condition during the film preparation with metal vapor vacuum arc (MEVVA) source ion implantation. Copyright © 2008 John Wiley & Sons, Ltd.

GE‐MXRF analysis of multilayer films

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A micro X-ray fluorescence analysis method using polycapillary X-ray optics and grazing exit geometry

Column-addressable and matrix-addressable multi-junction VCSEL arrays for all electronic-scanning LiDAR

GE‐MXRF analysis of multilayer films