Jian Chen

TL;DR: In this paper, a large-aperture ultra-smooth surface defect detection device and method is presented, which mainly consists of a laser device, a laser beam expanding system, a high-reflectivity mirror, a polarizer, a polarization splitting prism, a 1/4 wave plate, a rotary prism and a telecentric field lens.

TL;DR: In this article, a high-speed measuring device and method for surface scattering of a large-aperture material is proposed, which consists of a laser device, a laser beam expanding system, a first high-reflectivity mirror, a polarizer, a polarization splitting prism, a 1/4 wave plate, a second highreflective mirror, rotating prism, galvanometer, a telecentric field lens, a measured sample, a scattered light detector, a reflected light detector and a line triggering detector.

TL;DR: In this paper, a surface defect detection system with high-speed laser line scanning is presented, which mainly consists of a laser, a laser beam expanding system, a polarizer, a second high-reflectivity mirror, a wave plate, a third highreflective mirror, rotary prism, a row trigger detector, a telecentric field lens, laser focusing lattice lines, a sample under test, a scattering light collector, a line array scattering light detector and a cylindrical lens.

TL;DR: In this article, a detection and classification device for a surface defect of a big-aperture optical element is presented, which is suitable for optical nondestructive inspection, optical precision detection and optical microscopic imaging and defect analysis.