Hu Song

TL;DR: In this article, a structured light and dielectric microsphere joint modulation-based micro-nano structure super-resolution 3D shape detection method was proposed, in which a white light broad-spectrum light source was adopted, encoding control was performed on a measurement light field by using a spatial light modulator (DMD), and the microspheres were arranged on the surface of an object to be measured.

TL;DR: In this article, a high-speed detection method for the 3D topography of micro-nano structures based on structured light is proposed, where sinusoidal grating stripes projected by a structured light projectiondevice form an angle [theta] with optical axis, and an image is acquired by a CCD camera.

TL;DR: In this article, a super-resolution three-dimensional shape measurement method based on optical tweezers dielectric microspheres is proposed. But the method is not suitable for the measurement of micro-nano devices.

TL;DR: In this article, the authors proposed a rapid super-resolution imaging method based on structured light modulation, which comprises the following steps: generating structured light by using a digital micro-mirror device, irradiating the surface of a to-be-detected structure, and acquiring an image 1 aliased with a high-frequency signal beyond a diffraction limit on an image space; enabling a lighting source without structured light modulating the image by using the same structured light so as to obtain an image 2, and solving the difference of the frequency spectra, thereby obtaining the super