A pulse laser machining apparatus and method generates a clock signal, emits a pulse laser beam in synchronization with the clock signal, scans the pulse laser beam in synchronization with the clock signal only in a one-dimensional direction, moves a stage in a direction perpendicular to the one-dimensional direction, passes or cuts off the pulse laser beam in synchronization with the clock signal, and controls the passing or cutting off of the pulse laser beam based on the number of light pulses of the pulse laser beam

Pulse laser machining apparatus and pulse laser machining method

Provided is a film working method which is carried out at low energy, and which has superior work precision and work quality. A film working method removes a site to be removed on a film which is formed upon one face of a substrate by projecting a laser beam, forming a removed area. The laser beam projection projects two or more shots of a laser beam from a pulse laser light source. The first shot of the laser beam has an energy density which removes between 50% or more and less than 100% of the site to be removed in a perpendicular direction of the plane of the film. Each of the second and successive shots of the laser beam has 50%-100% of the energy density which the first shot of the laser beam has. The interval between shots of the laser beam is one second or more.

Film working method

PROBLEM TO BE SOLVED: To manufacture an electrode pattern high in precision, low in cost and large in area by using a laser beam forming mask having a plurality of laser beam forming holes. SOLUTION: A mask 1 for laser beam is irradiated with the laser beam 4 to separate the laser beam through a plurality of laser beam forming holes 2a, 2b into a plurality of laser beams of the corresponding beam shape, and a transparent electrically conductive film 5 is irradiated therewith via an optical system 3 for convergence. A glass substrate 9 is moved to form electrode gap areas 6a, 6b while evaporating the transparent electrically conductive film layer 5 located at a plurality of cut patterns 6e, 6f. A pattern including the laser beam forming holes 6a, 6b different in shape with electrode lines arranged at different intervals can be easily formed. The optical system for branching the laser beam preferably branches the laser beam 4 into the laser beams of the same number as that of the forming holes 2a, 2b, and radiate the branched laser beams 4 on the corresponding forming holes 2a, 2b and their peripheral parts.

Device and method for forming electrode pattern

PROBLEM TO BE SOLVED: To provide a method and device for shortening required time to make up hemming of band-shaped electrodes by removing unnecessary electrode parts remaining in the end parts of the band-shaped electrodes. SOLUTION: A method for laser beam machining to form a plurality of band-shaped electrodes 56 in parallel includes a process to emit laser beams on a thin film 54 through a mask having a plurality of laser beam passing- through holes formed by shifting their positions in the longitudinal direction and in the direction perpendicular to the former of the band-shaped electrodes, a process to form a plurality of band-shaped electrodes by shifting a substrate 52 in the longitudinal direction to the mask, and a process to arrange the end parts in the longitudinal direction of the band-shaped electrodes by shifting the substrate in the direction perpendicular to the mask.

Method for working transparent electrode in plasma display panel, plasma display panel, laser beam machining method, and laser beam machining device

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Device and method for forming electrode pattern

Method for working transparent electrode in plasma display panel, plasma display panel, laser beam machining method, and laser beam machining device