F. M. Anak
1 Papers
F. M. Anak is an academic researcher. The author has contributed to research in topics: Economies of agglomeration & Salicide. The author has an hindex of 1, co-authored 1 publications.
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Papers
On the influence of Ni(Pt)Si thin film formation on agglomeration threshold temperature and its impact on 3D imaging technology integration
TL;DR: In this article , the authors investigated the effect of the SALICIDE process on the Ni(Pt)Si agglomeration using different approaches such as (i) the classical one in which one anneal is applied to form silicide and leads also to aggloomation, (ii) the silicide formation through the standard SALICide process, "Self-Aligned Silicide" and a subsequent annealing to induce agglomation, and (iii) the standard SIS process for silicide surface encapsulation followed by an encapsulation of the top SiN layer as applied in devices.
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