The invention discloses a step scan projecting mask aligner multi-bus synchronization control method that supplies uniform time reference for control unit involved by all of the scan exposure by sync bus controller. Exposure control software transfers scan parameter to sync bus controller by VME bus interface of CPU board of industrial controlling machine, sync bus controller realizes accurately synchronous control to each control unit according to the designated parameters of CPU board. The profit effect is that the trigger time of each sync signal could be rigid controlled, thus the real time and synchronization of the signals between different control units would be realized.

Method for controlling multi bus time and sequence synchronization of advanced scanning projecting photoetching machine

Synchronous bus controller issues synchronizing information real time to work head motion control card, mask platform motion control card, and alignment motion control card through synchro data bus, said motion control card receiving synchronous bus controller interval synchronous signal and state synchronous signal and respectively synthesizing into optical fiber triggering signal and status signal, then sending to underlayer I/O control panel, alignment control system and leveling focusing control system. The present invention realizes real-time data communication and synchronization control among plurality of control units in step scan projection photoetching machine.

Photoetching machine synchronous sequential control serial data communication method and system and use

The invention provides a multi-axial synchronous motion control system which comprises an upper computer, synchronous signal modules, a main case and a plurality of auxiliary cases. The main case is communicated with the upper computer and comprises a main board and a plurality of auxiliary boards. The main board is respectively communicated with the auxiliary boards through a back board for transmission. The main board is communicated with the upper computer. One synchronous signal module is connected between each two auxiliary boards. One synchronous signal module is connected between each two auxiliary cases and between each auxiliary case and the main case. The invention further provides a control method of the multi-axial synchronous motion control system. The multi-axial synchronous motion control system is simple in structure, vividly layered, and easy to repair, replace, reuse and expand. The control system can meet the requirements for calculations of various complex control algorithms, path plans and the like and guarantees expansion of controlled axis number.

Multi-axial synchronous motion control system and control method thereof

The invention discloses a method and a device for synchronically acquiring terminal data of a powder distribution network. The method comprises the following steps of: A, periodically transmitting synchronous command frames carrying current time and synchronous sequence numbers to acquisition units through a bus by a main control unit; B, judging whether the synchronous command frames are synchronous sampling command frames or not, if SO, the step C1 is carried out, and if NO, the step C2 is carried out; C1, recording current sampling point numbers and current synchronous sequence numbers, setting a synchronous data computing mark so as to transmit telemetering vectors to the main control unit, and carrying out the step D; C2, setting a local clock of a sampling unit, and ending the step; and D, sequentially storing the telemetering vectors according to the corresponding synchronous sequence number, and setting corresponding data receiving success marks. In the invention, the main control unit transmits the synchronous command frames to the acquisition units through the bus, the acquisition units response to the synchronous command frames through the data receiving success marks, so that the management to the telemetering vectors can be realized, the synchroneity and the rapidity of the response of the acquisition units to the synchronous command frames can be ensured, and simultaneously, the accuracy of the synchronous command frames is ensured.

Method and device for synchronically acquiring terminal data of powder distribution network

The invention discloses a control method for control system in an immersion liquid transfer system in an immersion lithography machine. The immersion liquid transfer system in the immersion lithography machine comprises the control system, a water treatment subsystem, a transfer control subsystem and a pose adjustment subsystem, wherein the control system and the immersion lithography machine are connected by adopting an industrial bus; the control system exchanges data with the water treatment subsystem, the transfer control subsystem and the pose adjustment subsystem by adopting the Ethernet; and the control system is respectively responsible for performing a fault handling-contained sequential control method on the water treatment subsystem, the transfer control subsystem or the pose adjustment subsystem. According to the control method for control system in an immersion liquid transfer system in an immersion lithography machine disclosed by the invention, accurate sequential control can be well realized on all subsystems in the immersion liquid transfer system in the immersion lithography machine, and moreover, a fault handling mechanism is formulated, and therefore, the high-efficiency ordered operation of the control system in the immersion liquid transfer system in the immersion lithography machine is realized.

Control method for control system in immersion liquid transfer system in immersion lithography machine

The synchronous bus controller adopts internal self-defined sync bus, outer sync signal, and minimum time unit data transmitting period of sync bus as the sync time base, produces precise time control point with data transmission period FIFO queue and 'time-command' FIFO queue, to realize the strict sync course of the submodules in stepped scan projecting photoetching machine. The sync control system includes upper computer, industrial control computer CPU board, motion control card, laser counter card, alignment control system and lighting control system. The sync bus controller sends real-time sync information to the motion control card and sends sync triggering signal to the alignment control system and the lighting control system via the sync bus to ensure the complete sync among the workpiece table, the mask table, the exposure dosage and slit motion in continuous exposure and scanning control.

Synchronous bus controller of step scanning projection photo etching machine and synchronous control system

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Synchronous bus controller of step scanning projection photo etching machine and synchronous control system