Topic
Vacuum engineering
About: Vacuum engineering is a research topic. Over the lifetime, 318 publications have been published within this topic receiving 2989 citations. The topic is also known as: vacuum technology.
Papers published on a yearly basis
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Papers
Book•
1 Jan 1968
TL;DR: In this paper, Molecule-Molecule and Molecule Interactions are discussed in terms of collision processes in gases and interaction of charged particles with the surface of the surface.
Abstract: Contents: Molecule-Molecule and Molecule-Interactions. Collision Processes in Gases. Interaction of Charged Particles with Surfaces. Interaction of Radiation with Surfaces. Mechanical Properties of Materials at Very Low Pressures. General Considerations of Pressure Measurement. Total Pressure Gauges. Partial Pressure Gauges. Processing Techniques for Ultrahigh Vacuum. Pumps for Ultrahigh Vacuum. Examples of Ultrahigh Vacuum Systems.
278 citations
TL;DR: In this paper, a new vacuum technology is described which makes it possible to achieve working pressures as low as 10−10 mm Hg in a routine and straightforward fashion without the use of chemical getters, special traps, or refrigerants of any kind.
Abstract: A new vacuum technology is described which makes it possible to achieve working pressures as low as 10−10 mm Hg in a routine and straightforward fashion. This is accomplished without the use of chemical getters, special traps, or refrigerants of any kind. Essential to this technology are several new instruments which have been especially developed for the production or measurement of ultra high vacua. These new tools have permitted us to carry out a number of researches concerning the phenomena which occur at very low pressures. The ultra high vacuum technology has also made possible a new experimental approach in the fields of gaseous and physical electronics.
272 citations
TL;DR: In this paper, the theory of gases is used to describe flow of gases through tubes and orifices of a high-Vacuum system with positive displacement and positive displacement.
Abstract: Kinetic Theory of Gases. Flow of Gases Through Tubes and Orifices. Positive Displacement Vacuum Pumps. Kinetic Vacuum Pumps. Capture Vacuum Pumps. Vacuum Gauges. Partial Pressure Analysis. Leak Detection and Leak Detectors. High-Vacuum System Design. Gas-Surface Interactions and Diffusion. Ultrahigh and Extreme High Vacuum. Calibration and Standards Appendix. Indexes.
216 citations
Book•
27 Oct 1997
TL;DR: In this paper, the authors present an overview of the history of the use of VJ pumps in high-level applications in the field of high-dimensional (HVD) simulations.
Abstract: Preface. Fundamentals of Vacuum Technology and Surface Physics: B. Singh and J.H. Thomas, III, Vacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum Science. Creation of Vacuum: M. Hablanian, The Technology of Vacuum Pumps--An Overview. F.J. Eckle, Diaphragm Pumps. J. Richman, Blowers. Vapor Jet Pumps: M. Hablanian, Diffusion Pumps. G. Ash, Cryogenic Pumps. H. Henning, Turbomolecular Pumps. J. Singleton, UHV Pumps. Vacuum Measurements: H.M. Brady, R.H. Goehner, E. Drubetsky, and W.H. Bayles, Jr., Measurements of Pressure. L. Lieszkovszky, Mass Analysis and Partial Pressure Measurement. R. Outlaw, Analysis of Partial Pressure Information. L. Hinkle, Gas Flow Measurements. Systems Design and Components: Components for Vacuum Equipment and Systems: N.T. Peacock, Valves. N.T. Peacock, Flanges. W. Helgeland, Feedthroughs. C. Kraft, Ports. J. Panitz, Construction Materials: Properties Defining Material Performance. Vacuum Chamber Materials. Special Purpose Materials. R.N. Peacock, Seal Materials and Design. B. Dayton, Outgassing of Materials. J. Garner, Aluminum Based Vacuum Systems. D. Mattox, Preparation and Cleaning of Vacuum Surfaces. Vacuum Applications: High Vacuum Based Processes: S. Rossnagel, Sputtering. V. Patel, Plasma Etching. M. Powers, Ion Beam Based Processes. J. Cheung, Laser Ablation. F. Jansen, CVD and PECVD. J. Thomas, UHV Based Processes. Large-Scale Vacuum Based Processes: W. Robbins, Large Area Coatings. H.F. Dylla, The Development of Ultrahigh Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices.
180 citations
Related Topics (5)
Performance Metrics
| Year | Papers |
|---|---|
| 2021 | 2 |
| 2020 | 1 |
| 2019 | 2 |
| 2018 | 1 |
| 2017 | 3 |
| 2016 | 5 |