Topic
Tuning fork
About: Tuning fork is a research topic. Over the lifetime, 2978 publications have been published within this topic receiving 29690 citations.
Papers published on a yearly basis
1 / 3
Papers
TL;DR: In this paper, the resonant gate transistor (RGT) is described as an electrostatically excited tuning fork employing field effect transistor readout, which can be batch-fabricated in a manner consistent with silicon technology.
Abstract: A device is described which permits high- Q frequency selection to be incorporated into silicon integrated circuits. It is essentially an electrostatically excited tuning fork employing field-effect transistor "readout." The device, which is called the resonant gate transistor (RGT), can be batch-fabricated in a manner consistent with silicon technology. Experimental RGT's with gold vibrating beams operating in the frequency range 1 kHz 0 Q 's as high as 500 and overall input-output voltage gain approaching + 10 dB have been constructed. The mechanical and electrical operation of the RGT is analyzed. Expressions are derived for both the beam and the detector characteristic voltage, the device center frequency, as well as the device gain and gain-stability product. A batch-fabrication procedure for the RGT is demonstrated and theory and experiment corroborated. Both single- and multiple-pole pair band pass filters are fabricated and discussed. Temperature coefficients of frequency as low as 90- 150 ppm/°C for the finished batch-fabricated device were demonstrated.
1,211 citations
TL;DR: In this paper, a novel technique is employed which simplifies the interpretation of the data and increases the imaging speed by at least one order of magnitude compared to previous implementations, and the variation of the imaging signal with distance fits well to a Hertzian contact model.
Abstract: Force sensors are key elements of atomic force microscopes and surface profilometers Sensors with an integrated deflection meter are particularly desirable Here, quartz tuning forks as used in watches are utilized as force sensors A novel technique is employed which simplifies the interpretation of the data and increases the imaging speed by at least one order of magnitude compared to previous implementations The variation of the imaging signal with distance fits well to a Hertzian contact model Images of compact discs and calibration gratings, which have been obtained with scanning speeds up to 230 μm/s, are presented
645 citations
TL;DR: In this article, the authors described a method and apparatus for detecting photoacoustic signals in fluid media by using piezoelectric crystal quartz, which is preferably in the shape of a tuning fork.
Abstract: Methods and apparatus for detecting photoacoustic signals in fluid media are described. The present invention differs from conventional photoacoustic spectroscopy in that rather than accumulating the absorbed energy in the fluid of a sample cell, the absorbed energy is accumulated in an acoustic detector or sensitive element. In a preferred embodiment, the acoustic detector comprises piezoelectric crystal quartz. The quartz is preferably in the shape of a tuning fork.
548 citations
TL;DR: In this paper, the authors describe the operation of a vacuum packaged resonant accelerometer subjected to static and dynamic acceleration testing and show that it exhibits a noise floor of 40 /spl mu/g/g//spl radic/(Hz) for an input acceleration frequency of 300 Hz.
Abstract: This paper describes the operation of a vacuum packaged resonant accelerometer subjected to static and dynamic acceleration testing. The device response is in broad agreement with a new analytical model of its behavior under an applied time-varying acceleration. Measurements include tests of the scale factor of the sensor and the dependence of the output sideband power and the noise floor of the double-ended tuning fork oscillators as a function of the applied acceleration frequency. The resolution of resonant accelerometers is shown to degrade 20 dB/decade beyond a certain characteristic acceleration corner frequency. A prototype device was fabricated at Sandia National Laboratories and exhibits a noise floor of 40 /spl mu/g//spl radic/(Hz) for an input acceleration frequency of 300 Hz.
366 citations
TL;DR: In this paper, the error sources defining tactical-grade performance in silicon, in-plane tuning-fork gyroscopes such as the Honeywell-Draper units being delivered for military applications are analyzed.
Abstract: This paper analyzes the error sources defining tactical-grade performance in silicon, in-plane tuning-fork gyroscopes such as the Honeywell-Draper units being delivered for military applications. These analyses have not yet appeared in the literature. These units incorporate crystalline silicon anodically bonded to a glass substrate. After general descriptions of the tuning-fork gyroscope, ordering modal frequencies, fundamental dynamics, force, and fluid coupling, which dictate the need for vacuum packaging, mechanical quadrature, and electrical coupling are analyzed. Alternative strategies for handling these engineering issues are discussed by introducing the Systron Donner/BEI quartz rate sensor, a successful commercial product, and the Analog Device (ADXRS), which is designed for automotive applications.
294 citations
Related Topics (5)
Performance Metrics
| Year | Papers |
|---|---|
| 2025 | 30 |
| 2024 | 28 |
| 2023 | 24 |
| 2022 | 73 |
| 2021 | 47 |
| 2020 | 68 |