Triode

Abstract: This invention improves the stability and control of high-pressure glow discharges by means of a microhllow cathode discharge. The microhollow cathode discharge, which is sustained between two closely spaced electrodes with an opening formed in the electrodes, serves as a plasma cathode for the high-pressure glow. Small variations in the microhollow cathode discharge voltage generate large variations in the microhollow cathode discharge current and consequently in the glow discharge current. In this mode of operation the electrical characteristic of this invention resembles that of a vacuum triode. Using the microhollow cathode discharge as a plasma cathode, stable, dc discharges in argon up to atmospheric pressures can be generated. Additionally, parallel operation of these discharges allows for the generation of large volume plasmas at high gas pressure through superposition of individual glow discharges. Thus, this invention allows simultaneous generation of relatively high electron densities at relatively low temperatures with stable, direct current, homogenous glow discharge plasma at relatively high pressure.

Abstract: An array of microelectronic tubes is shown which includes a plate-like substrate upon which an array of sharp needle-like cathode electrodes is located. Each tube in the array includes an anode electrode spaced from the cathode electrode. The tubes each contain gas at a pressure of between about 1/100 and 1 atmosphere, and the spacing between the tip of the cathode electrodes and anode electrodes is equal to or less than about 0.5 μm. The tubes are operated at voltages such that the mean free path of electrons travelling in the gas between the cathode and anode electrodes is equal to or greater than the spacing between the tip of the cathode electrode and the associated anode electrode. Both diode and triode arrays are shown.

Abstract: The present invention relates generally to a new integrated Vacuum Microelectronic Device (VMD) and a method for making the same. Vacuum Microelectronic Devices require several unique three dimensional structures: a sharp field emission tip, accurate alignment of the tip inside a control grid structure in a vacuum environment, and an anode to collect electrons emitted by the tip. Also disclosed is a new structure and a process for forming diodes, triodes, tetrodes, pentodes and other similar structures. The final structure made can also be connected to other similar VMD devices or to other electronic devices.