Support surface

Abstract: A vacuum chuck and a process chamber equipped with the same are provided. The vacuum chuck assembly comprises a support body, a plurality of protrusions, a plurality of channels, at least one support member supporting the support body, at least one resilient member coupled with the support member, a hollow shaft supporting the support body, at least one electrical connector disposed through the hollow shaft, and an air-cooling apparatus. The support body has a support surface for holding a substrate (such as a wafer) thereon. The protrusions are formed on and project from the support surface for creating a gap between the substrate and the support surface. The channels are formed on the support surface for generating reduced pressure in the gap. The air-cooling apparatus is used for providing air cooling in the vicinity of the electrical connector.

Abstract: A support surface for general skin cooling, or reducing the incidence and promoting the healing of bedsores, includes: (a) at least one thermal layer comprising: a phase change material having a melting point of between about 18 and 32 degrees Centigrade; a gel or viscous fluid carrier in which the phase change material is substantially evenly distributed; and a fluid-impermeable, conformable envelope surrounding the phase change material and the carrier; (b) at least one conformable compression support layer beneath and adjacent to the thermal layer; (c) at least one conformable base support layer beneath and adjacent to the compression layer, the base support layer having a higher indentor load deflection (ILD) than the compression layer. A preferred embodiment, with or without the thermal layer, includes a heat tube layer. Another preferred embodiment includes an envelope containing phase change material in a carrier material, without either of the support layers.

Abstract: A mattress assembly for the treatment and prevention of decubitus ulcers and for the treatment of other conditions of the skin and/or underlying tissue. The assembly includes a base support, mattress core disposed on the support and defining a plurality of discrete, air permeable, hydrophobic air cells, and a pair of lateral bolsters disposed adjacent the sides of the mattress core. A top sheet formed of an air and liquid permeable, highly elastic, low friction water wicking material is disposed over the core and bolsters to provide a planar support surface which readily conforms to the irregularities in the topography of the body of a person resting thereon without wrinkling so as to minimize the shear forces acting on the skin and draw moisture away from the skin. A pump or other suitable means is provided for directing air flow through a plurality of controllable valves to and through the cells of the mattress core and top sheet to inflate the cells for supporting a person thereon and maintaining the skin in a properly hydrated condition. A control assembly regulates the air pressure within individual or groups of cells to maintain the contact pressure of the mattress assembly against the skin of a person thereon at a desired level and to facilitate physician and nursing care.

Abstract: An air inflatable mattress and mattress coverlet are provided for the prevention and treatment of decubitus ulcers (i.e., pressure sores or bedsores). The mattress incorporates a user selectable static or alternating air powered support surface for more uniformly redistributing pressure exerted on a patient's skin. The mattress coverlet encompasses a low air loss feature independent of the mattress's user selectable air powered support surface. Such low air loss feature provides a patient contact surface exhibiting a high moisture vapor transfer ratio in conjunction with a forced air flow to aid in reducing the moisture and heat near the patient's body. Both the mattress and mattress coverlet are driven by an external control system which houses the user controls, as well as the necessary pumps, regulators, and valving.