Topic
PMUT
About: PMUT is a research topic. Over the lifetime, 4692 publications have been published within this topic receiving 78707 citations.
Papers published on a yearly basis
1 / 2
Papers
TL;DR: In this article, the authors reviewed the literature in this field, with an emphasis on the factors that impact the magnitude of the available piezoelectric response for non-ferroelectric materials such as ZnO and AlN.
Abstract: Thin film piezoelectric materials offer a number of advantages in microelectromechanical systems (MEMS), due to the large motions that can be generated, often with low hysteresis, the high available energy densities, as well as high sensitivity sensors with wide dynamic ranges, and low power requirements This paper reviews the literature in this field, with an emphasis on the factors that impact the magnitude of the available piezoelectric response For non-ferroelectric piezoelectrics such as ZnO and AlN, the importance of film orientation is discussed The high available electrical resistivity in AlN, its compatibility with CMOS processing, and its high frequency constant make it especially attractive in resonator applications The higher piezoelectric response available in ferroelectric films enables lower voltage operation of actuators, as well as high sensitivity sensors Among ferroelectric films, the majority of the MEMS sensors and actuators developed have utilized lead zirconate titanate (PZT) films as the transducer Randomly oriented PZT films show piezoelectric e(31, f) coefficients of about - 7 C/m(2) at the morphotropic phase boundary In PZT films, orientation, composition, grain size, defect chemistry, and mechanical boundary conditions all impact the observed piezoelectric coefficients The highest achievable piezoelectric responses can be observed in {001} oriented rhombohedrally-distorted perovskites For a variety of such films, e(31,f) coefficients of - 12 to - 27 C/m(2) have been reported
1,114 citations
TL;DR: An overview of piezoelectric polymers based on their operating principle is given in this paper, which includes three main categories: bulk polymers, piezocomposites and voided charged polymers.
Abstract: Polymer based MEMS and microfluidic devices have the advantages of mechanical flexibility, lower fabrication cost and faster processing over silicon based ones. Also, many polymer materials are considered biocompatible and can be used in biological applications. A valuable class of polymers for microfabricated devices is piezoelectric functional polymers. In addition to the normal advantages of polymers, piezoelectric polymers can be directly used as an active material in different transduction applications. This paper gives an overview of piezoelectric polymers based on their operating principle. This includes three main categories: bulk piezoelectric polymers, piezocomposites and voided charged polymers. State-of-the-art piezopolymers of each category are presented with a focus on fabrication techniques and material properties. A comparison between the different piezoelectric polymers and common inorganic piezoelectric materials (PZT, ZnO, AlN and PMN?PT) is also provided in terms of piezoelectric properties. The use of piezopolymers in different electromechanical devices is also presented. This includes tactile sensors, energy harvesters, acoustic transducers and inertial sensors.
945 citations
1 Jan 1964
922 citations
TL;DR: A piezoelectric nanogenerator based on PZT nanofibers, with a diameter and length of approximately 60 nm and 500 microm, was reported, aligned on interdigitated electrodes of platinum fine wires and packaged using a soft polymer on a silicon substrate.
Abstract: Energy harvesting technologies that are engineered to miniature sizes, while still increasing the power delivered to wireless electronics,(1, 2) portable devices, stretchable electronics,(3) and implantable biosensors,(4, 5) are strongly desired. Piezoelectric nanowire- and nanofiber-based generators have potential uses for powering such devices through a conversion of mechanical energy into electrical energy.(6) However, the piezoelectric voltage constant of the semiconductor piezoelectric nanowires in the recently reported piezoelectric nanogenerators(7-12) is lower than that of lead zirconate titanate (PZT) nanomaterials. Here we report a piezoelectric nanogenerator based on PZT nanofibers. The PZT nanofibers, with a diameter and length of approximately 60 nm and 500 μm, were aligned on interdigitated electrodes of platinum fine wires and packaged using a soft polymer on a silicon substrate. The measured output voltage and power under periodic stress application to the soft polymer was 1.63 V and 0.03 ...
913 citations
TL;DR: In this paper, the thickness-expander plate, the end-electroded bar, and the side-electrodebased bar are presented for three types of piezoelectric transducers.
Abstract: New equivalent circuits, having several advantages over previous circuits, are presented for three types of piezoelectric transducer: the thickness-expander plate, the end-electroded bar and the side-electroded bar. Each of the circuits involves an electrical network of frequency-dependent components connected to the centre of an acoustic transmission line.
904 citations
Related Topics (5)
Performance Metrics
| Year | Papers |
|---|---|
| 2026 | 1 |
| 2025 | 42 |
| 2024 | 55 |
| 2023 | 83 |
| 2022 | 133 |
| 2021 | 76 |