Piece table

Abstract: An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed. The apparatus and method includes an optical assembly (16) configured to project an image onto a work piece (208) and a stage assembly (202) including a work piece table (204) configured to support the work piece (208) adjacent the optical assembly (16). An environmental system (26) is provided to supply and remove an immersion fluid (212) from a gap between the optical assembly (16) and the work piece (208) on the stage assembly (202). After exposure of the work piece (208) is complete, an exchange system (216) removes the work piece (208) and replaces it with a second work piece. An immersion fluid containment system (214) is provided to maintain the immersion liquid (212) in the gap during removal of the first work piece (208) and replacement with the second work piece.

Abstract: A method and word processing system for handling text pasted into a document that uses a paragraph delimiter different than that employed by the word processing system. A computer system (10) that is generally conventional in design executes a word processing program that efficiently handles text pasted into a word processing document, even though that text uses a paragraph delimiter different than the native paragraph delimiter of the word processing system. The document opened by the word processing system has a corresponding piece table that includes an array of character positions and an array of data records. Each piece of the piece table represents adjacent characters that stored together in a file, and each record or PCD in the array of data records corresponds to a different piece in the piece table. When a file is opened to select text that will be pasted into the word processing document, a corresponding entry is made in the piece table that includes pointers to a file control block (FCB) for the opened file. The FCB indicates the type of paragraph delimiter used for that text. Thus, the word processing system tracks the appropriate paragraph delimiter used and translates any foreign paragraph delimiter to the native delimiter when displaying the text for editing. When the document is saved to a file, the paragraph delimiter associated with the text is translated to the native paragraph delimiter used by the word processing system.

Abstract: An apparatus and method maintain immersion fluid in the gap adjacent to the projection lens during the exchange of a work piece in a lithography machine. The apparatus and method include an optical assembly that projects an image onto a work piece and a stage assembly including a work piece table that supports the work piece adjacent to the optical assembly. An environmental system is provided to supply and remove an immersion fluid from the gap between the optical assembly and the work piece on the stage assembly. After exposure of the work piece is complete, an exchange system removes the work piece and replaces it with a second work piece. An immersion fluid containment system maintains the immersion liquid in the gap during removal of the first work piece and replacement with the second work piece.

Abstract: A method and word processing system for handling text pasted into a document that uses a foreign character set or code page. The code page used by text pasted into a document is preserved when that is displayed and edited. The word processing system keeps track of the appropriate code page for each run of text in the document using a piece table and a data block for the file(s) in which each piece of text is stored. Each document that is created has a piece table that includes an array of character positions and a corresponding array of data records. Each piece referenced in the array of character positions includes adjacent characters of text that are stored in a common file. When a file is opened to paste text into the document, the word processing system creates a file control block for that file, which includes a default code page identifier. The array of data records for each piece includes a pointer to the file control block. For any run of text that uses a code page different than the default for the file, an exception block is created. By referencing the default code page and any exception block, the word processing system determines the appropriate code page to be applied when text is displayed and edited. Foreign code page characters are translated into the native code page characters in the display buffer, but references to the foreign code pages are preserved when the document is stored, so that the characters encoded using the foreign code page are not lost or changed in the document.