Topic
Pellistor
About: Pellistor is a research topic. Over the lifetime, 77 publications have been published within this topic receiving 843 citations.
Papers published on a yearly basis
Papers
TL;DR: Four novel resistive micro-heater designs are reported here and fabricated on hotplates with an active area that ranges from (200 X 200) muM(2) to (570 X 570)muM( 2) in order to vary systematically the ratio of membrane to heater length from a value of 5.0-2.7, respectively.
105 citations
TL;DR: In this article, it is shown how the cross-sensitivity can be reduced by using an integrated Si-planar-pellistor array or a single pellistor sensor operating at different working points as a quasi array in connection with signal evaluation by pattern recognition (PARC).
Abstract: The detection of combustible gases with the aid of the heat exchange in chemical reactions on a solid surface has been known for many years. A large number of this type of sensor is used for gas detection. One of them is the Si-Planar-Pellistor, a small gas sensor, produced by Si micromachining technology. The advantage of this sensor is the low power consumption and the very low thermal time constant. A problem of all sensors using this method of heat exchange is the cross-sensitivity to most combustible gases. In this paper it will be shown how the cross-sensitivity can be reduced by using an integrated Si-Planar-Pellistor array or a single pellistor sensor operating at different working points as a quasi array in connection with signal evaluation by pattern recognition (PARC).
78 citations
TL;DR: The Si planar pellistor is a small gas sensor (850 μm2) using the heat of reaction in an oxygen atmosphere or heat of thermal decomposition in a nonoxygen atmosphere as a measure of the gas concentration.
Abstract: A novel pellistor sensor structure has been fabricated by Si micromachining technology and tested for the measurement of combustible gases. The Si planar pellistor is a small gas sensor (850 μm2) using the heat of reaction in an oxygen atmosphere or the heat of thermal decomposition in a non-oxygen atmosphere as a measure of the gas concentration. In the simplest form a metallic meander resistor serves as the heater, the temperature sensor and the catalyser of the sensor element. The thermal insulation and the mechanical suspension between the heated sensor and the substrate are realized by a thin (150 nm) LPCVD Si3N4 membrane. The preparation and results of measurements are presented and the optimization of the structure with respect to the sensor dimensions and the variation of temperature over the sensing area is discussed.
65 citations
TL;DR: In this paper, an optimum diffusion-limited response of 15 − 30 mV/(% H2), depending on reactor geometry, was obtained with pellistors operated at ≈200 °C under atmospheric pressure.
58 citations
TL;DR: In this article, the accurate temperature detection in the micro-scale by different measurement methods for the deduction of steady state and transient thermal properties from the results was investigated by application of a simplified thermal equivalent circuit model.
45 citations
Related Topics (5)
Performance Metrics
| Year | Papers |
|---|---|
| 2021 | 2 |
| 2020 | 2 |
| 2019 | 2 |
| 2018 | 1 |
| 2016 | 1 |
| 2015 | 4 |