Topic
Mirror galvanometer
About: Mirror galvanometer is a research topic. Over the lifetime, 487 publications have been published within this topic receiving 5207 citations.
Papers published on a yearly basis
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Papers
TL;DR: By solving a detailed thermal model using the finite element method (FEM), substantial knowledge of adequate parameter settings in dependence of the utilised material is developed and a process window as a function of scan speed and beam power is developed based on experimental results.
Abstract: In recent years, the scientific and industrial relevance of additive layer manufacturing (ALM) has grown. In the metal area of ALM, the capacity of laser technologies is noticeably limited. This is mainly due to an inertial beam deflection device, which is also referred to as a mirror galvanometer. In contrast, the electron beam technology offers high power density as well as considerable scanning rates. Therefore, electron beam melting (EBM) seems to be suitable for processing a broad variety of alloys in an economic way. In particular, the enormous scanning rates which can be realized by use of an electron beam enable an economic manufacture of high quality parts. However, profound expertise is required in order to establish EBM as an industrial production technology. By means of mathematical–physical modelling, process stability of the melting step is being increased. Moreover, by solving a detailed thermal model using the finite element method (FEM), substantial knowledge of adequate parameter settings in dependence of the utilised material is developed. Finally, a process window as a function of scan speed and beam power is developed based on experimental results.
264 citations
Patent•
8 Dec 1994
TL;DR: In this paper, a slim-type small size mirror galvanometer is made using semiconductor manufacturing techniques to form a silicon substrate 2 having a planar movable plate 5 and a torsion bar 6 for axially supporting the movable plates formed integrally therewith.
Abstract: A slim-type small size mirror galvanometer is made using semiconductor manufacturing techniques to form a silicon substrate 2 having a planar movable plate 5 and a torsion bar 6 for axially supporting the movable plate 5 formed integrally therewith, with a planar coil 7 and a total reflecting mirror 8 provided on an upper face of the movable plate 5. Upper and lower glass substrates 3, 4 are provided on upper and lower faces of the silicon substrate 2, and permanent magnets 10A, 10B and 11A, 11B are fixed to the upper and lower substrates 3, 4 at predetermined locations so as to produce a magnetic field at the planar coil 7. The direction and quantity of current flowing in the planar coil 7 is controlled to variably control the displacement angle of the movable plate 5 depending on the balance between the generated magnetic force and the torsion force of the torsion bar 6.
141 citations
TL;DR: In this paper, a galvanometer beam positioning system is used to cover the surface of an integrated circuit on which "repair" is to be performed, at high speed, using small galvanometer mirrors.
116 citations
Patent•
13 Mar 2012TL;DR: In this paper, a laser machining device with a laser oscillator for generating a laser beam, a main deflecting galvannometer mirror, an Fθ lens, and a sub-deflecting means arranged in an optical path between the laser oscillators and the main galvanometer mirror is described.
Abstract: A laser machining device according to the invention is provided with a laser oscillator for generating a laser beam, a main deflecting galvannometer mirror, an Fθ lens, and a sub-deflecting means arranged in an optical path between the laser oscillator and the main deflecting galvanometer mirror. A means for splitting a laser beam is provided, and the sub-deflecting means is inserted into the optical path of one of the split laser beams. At the same time, both the split laser beams are incident from the same main deflecting galvannometer mirror to the Fθ lens, and a numerical aperture in the optical system constituted by the main deflecting galvannometer mirror, the Fθ lens, and an object is set to be not more than 0.08.
114 citations
TL;DR: The three most common profiles of scanning functions for galvanometer-based scanners (GSs): the sawtooth, triangular and sinusoidal functions are analyzed and certain rules of thumb are deduced to make the best out of the galvoscanner.
Abstract: We analyze the three most common profiles of scanning functions for galvanometer-based scanners (GSs): the sawtooth, triangular and sinusoidal functions. They are determined experimentally with regard to the scan parameters of the input signal (i.e., frequency and amplitude). We study the differences of the output function of the GS measured as the positional error of the oscillatory mirror from the ideal function given by the input signal of the device. The limits in achieving the different types of scanning functions in terms of duty cycle and linearity are determined experimentally for the possible range of scan parameters. Of particular importance are the preservation of an imposed duty cycle and profile for the sawtooth function, the quantification of the linearity for the sinusoidal function, and the effective duty cycle for the triangular, as well as for the other functions. The range of scan amplitudes for which the stability of the oscillatory regime of the galvo mirror is stable for different frequencies is also highlighted. While the use of the device in certain scanning regimes is studied, certain rules of thumb are deduced to make the best out of the galvoscanner. Finally, the three types of scanning functions are tested with a Fourier domain optical coherence tomography (FD OCT) setup and the conclusions of the study are demonstrated in an imaging application by correlating the determined limits of the scanning regimes with the requirements of OCT.
110 citations
Related Topics (5)
Performance Metrics
| Year | Papers |
|---|---|
| 2021 | 5 |
| 2020 | 8 |
| 2019 | 6 |
| 2018 | 8 |
| 2017 | 7 |
| 2016 | 9 |