Topic
Mass flow controller
About: Mass flow controller is a research topic. Over the lifetime, 2264 publications have been published within this topic receiving 23394 citations.
Papers published on a yearly basis
1 / 2
Papers
TL;DR: It is demonstrated that, with the proposed controller, the boost converter has a faster response and a lower voltage overshoot over a wide range of operating conditions as compared to that under the widely used peak current-mode controller.
Abstract: This paper proposes a fast-response sliding-mode controller for controlling boost-type converters requiring a fast dynamical response over a wide range of operating conditions. The various aspects of the controller, which include the method of generating the reference-current profile, the choice of sliding surface, the existence and stability properties, and the selection of the control parameters, are discussed. Experimental results are presented to validate the theoretical design and to illustrate the strength of the proposed controller. It is demonstrated that, with the proposed controller, the boost converter has a faster response and a lower voltage overshoot over a wide range of operating conditions as compared to that under the widely used peak current-mode controller. Moreover, it is easily realized with simple analog circuitries.
233 citations
Patent•
24 Apr 2002
TL;DR: In this article, a system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controllers is presented.
Abstract: A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.
202 citations
Patent•
4 Jan 2002
TL;DR: In this article, the authors present a system for dividing a single mass flow, including an inlet adapted to receive the one mass flow and at least two flow lines connected to the inlet.
Abstract: A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a desired ratio of flow through a user interface, receive signals indicative of measured flow from the flow meters, calculate an actual ratio of flow through the flow lines based upon the measured flows, and compare the actual ratio to the desired ratio. The controller is also programmed to calculate the desired flow through at least one of the flow lines if the actual ratio is unequal to the desired ratio, and provide a signal indicative of the desired flow to at least one of the valves.
165 citations
Patent•
28 Aug 2012TL;DR: In this article, a method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a Mass Flow Controller used with a tool for semiconductor or solar cell fabrication.
Abstract: A method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a mass flow controller used with a tool for semiconductor or solar cell fabrication. To verify the mass flow rate measured by the mass flow controller, gas passing through the mass flow controller is also passed through a mass flow meter. The measured flow rate through the mass flow controller is compared to the measured flow rate through the mass flow meter and any difference between the two measured flow rates is determined. Depending upon the magnitude of any difference, the flow of gas to the mass flow controller may be altered.
162 citations
Patent•
27 Jun 2011TL;DR: In this article, a dual-process module with mass flow controllers for processing wafers is presented, which includes: dual process sections integrated together; at least one mass flow controller (MFC) each shared by the dual process segments and provided in a gas line branching into two gas lines, at a branching point, connected to the respective interiors of the dual processes and arranged symmetrically between the dualprocess sections.
Abstract: A dual section module with mass flow controllers, for processing wafers, includes: dual process sections integrated together; at least one mass flow controller (MFC) each shared by the dual process sections and provided in a gas line branching into two gas lines, at a branching point, connected to the respective interiors of the dual process sections and arranged symmetrically between the dual process sections; and at least one mass flow controller (MFC) each unshared by the dual process sections and provided in a gas line connected to the interior of each dual process section.
156 citations
Related Topics (5)
Performance Metrics
| Year | Papers |
|---|---|
| 2021 | 16 |
| 2020 | 38 |
| 2019 | 60 |
| 2018 | 46 |
| 2017 | 71 |
| 2016 | 81 |