TL;DR: In this paper, the feasibility of constructing an autonomous sensor array on a standard silicon wafer is explored, and various sensor architectures, power supplies, communications methods, and isolation techniques are discussed, and particular choices are made.
Abstract: This paper explores the feasibility of constructing an autonomous sensor array on a standard silicon wafer. Such a sensor-wafer would include integrated electronics, power, and communications, and would be capable of being placed into a standard production process step, or short sequence of steps. During the processing of the sensor-wafer, various process parameters would be measured and recorded. There are several uses for such a sensor wafer, including equipment characterization and design, process calibration, and equipment qualification and diagnosis. In this paper, various sensor architectures, power supplies, communications methods, and isolation techniques are discussed, and particular choices are made. Several proof-of-concept designs that measure film-thickness and temperature are discussed, and test results are reviewed for each design.
TL;DR: In this paper, the development of guidance for the equipment qualification (EQ) of analytical instruments is described, which is a formal process that provides documented evidence that an instrument is fit for its intended purpose and kept in a state of maintenance and calibration consistent with its use.
Abstract: This paper describes the development of guidance for the equipment qualification (EQ) of analytical instruments. EQ is a formal process that provides documented evidence that an instrument is fit for its intended purpose and kept in a state of maintenance and calibration consistent with its use.
TL;DR: In this article, three-component ground motions recorded in 18 earthquakes were analyzed and the records were cross-compared based on several parameters and the best candidate for the input motion was selected and modified by time-domain spectral matching procedure.
Abstract: Thirty five three-component ground motions recorded in 18 earthquakes were analyzed and the records were cross-compared based on several parameters. The “best candidate” for the input motion was selected and modified by time-domain spectral matching procedure. The resulting strong motion time history preserves the nonstationary behavior of the real earthquake record while its response spectra envelope the IEEE target response spectra in a broad range of natural frequencies as required by the standard. The resulting strong motion time history is intended for use for equipment qualification testing, and will be considered for inclusion in a future revision to IEEE 693. Additional requirements for the input motion specification and generation procedure in the IEEE 693-1997 are recommended.
TL;DR: This article describes types of Near-Infrared Procedures to be Validated and their requirements, and describes the development and implementation of Qualitative Analysis for Calibration Model Validation.
Abstract: The sections in this article are
Preface
Introduction
Background and Purpose
Overview
Types of Near-Infrared Procedures to be Validated
Validation Requirements
Equipment
Equipment Selection
Equipment Qualification
Design Qualification
Installation Qualification
Operational Qualification
Performance Qualification
Change Control
Hardware
Software
Glossary
References
Books
Useful Reference Journals
Useful Papers
Technical Guidelines for Qualitative Methods
Introduction to Qualitative Analysis
Feasibility Study
Sample Authentication, Collection and Measurement
Sample Measurement/Presentation
Measurement by Transmission
Liquids and Solutions
Solids
Measurement by Diffuse Reflection
Measurement by Transflection
Library Development
Define the Purpose
Selection of Samples/Spectra for Calibration Set
Display Data
Calibration Set Selection
Data Pre-Processing/Transformation
Library Construction
Determination of Thresholds
Library Validation
Internal and External Validation
Internal
External
Specificity
Repeatability
Robustness
Routine Use
Out-of-Specification Results
Library Maintenance
Database
Material Groupings
New Materials Addition
Material “Library Group” Modification
Technical Guidelines for Quantitative Methods
Introduction to Quantitative Analysis
Feasibility Study
Sample Collection
Sample Scanning
Displaying and Checking Spectra
Reference Data
Sample Selection – Calibration and Calibration Test Sets
Data Pre-Processing
Generation of Calibration Model
Validation of Calibration Model
Performance Verification
Accuracy Monitoring
Use of a Check Sample
Comparison with Reference Method
Maintenance of the Calibration Model
Method Transfer
Acknowledgments
TL;DR: In this paper, a method for evaluating the quality of data collection in a manufacturing environment is provided, where data are intended to be analyzed by a process control system, and the method comprising the following steps (a) collecting raw data according to a data collection plan specifying, and for each data item, a sampling time reference indicating at which time interval it is expected, and associating to each collected data item a timestamp indicating its actual collection time, determining a Data Collection Quality Value (DCQV) by: (b) reading the timestamps; (c) computing
Abstract: A method for evaluating the quality of data collection in a manufacturing environment is provided. Said data are intended to be analyzed by a process control system. The method comprising the following steps (A) collecting raw data according to a Data Collection plan specifying, and for each data item, a sampling time reference indicating at which time interval it is expected, and associating to each collected data item a timestamp indicating its actual collection time, (B) for at least a part of the raw data included inside a predetermined window, determining a Data Collection Quality Value (DCQV) by: (a) reading the timestamps; (b) computing at least one quality indicator value from the relationship between each timestamp and the corresponding time reference, wherein a shift represents a malfunction of the equipment or of the data collection system; (c) after steps (b) and (c) have been performed for all data items, computing a single data collection quality value (DCQV) indicator for said time window. Application to data qualification for analysis and equipment qualification e.g. in a semiconductor fab.