Embossing

Abstract: 4.1. Nanomachining with Scanning Probes 1831 4.2. Soft Lithography 1832 4.3. Embossing with Rigid Masters 1835 4.4. Near-Field Phase-Shifting Photolithography 1835 4.5. Topographically Directed Photolithography 1837 4.6. Topographically Directed Etching 1837 4.7. Lithography with Neutral Metastable Atoms 1838 4.8. Approaches to Size Reduction 1839 5. Techniques for Making Regular or Simple Patterns 1839

Abstract: Nanoimprinting promises low-cost fabrication of micro- and nano-devices by embossing features from a hard mould onto thermoplastic materials, typically polymers with low glass transition temperature. The success and proliferation of such methods critically rely on the manufacturing of robust and durable master moulds. Silicon-based moulds are brittle and have limited longevity. Metal moulds are stronger than semiconductors, but patterning of metals on the nanometre scale is limited by their finite grain size. Amorphous metals (metallic glasses) exhibit superior mechanical properties and are intrinsically free from grain size limitations. Here we demonstrate direct nanopatterning of metallic glasses by hot embossing, generating feature sizes as small as 13 nm. After subsequently crystallizing the as-formed metallic glass mould, we show that another amorphous sample of the same alloy can be formed on the crystallized mould. In addition, metallic glass replicas can also be used as moulds for polymers or other metallic glasses with lower softening temperatures. Using this 'spawning' process, we can massively replicate patterned surfaces through direct moulding without using conventional lithography. We anticipate that our findings will catalyse the development of micro- and nanoscale metallic glass applications that capitalize on the outstanding mechanical properties, microstructural homogeneity and isotropy, and ease of thermoplastic forming exhibited by these materials.

Abstract: Polymer microfabrication methods are becoming increasingly important as low-cost alternatives to the silicon or glass-based MEMS technologies We present in this paper the technology of hot embossing as a flexible, low-cost microfabrication method for polymer microstructures, which uses the replication of a micromachined embossing master to generate microstructures on a polymer substrate With this fabrication technology high aspect ratio structures can be fabricated over large surface areas, which allows a commercially successful manufacturing of polymer microcomponents

Abstract: A partially coated electrosurgical electrode has a portion of a medical grade metallic material as a substrate for energy application. Conductive of sites of metallic material or alloys thereof pass energy through peaks that define valleys nearby. A partial coating in the valleys has a low surface free energy. A treated surface across the peaks and generally over the filled valleys is relatively smooth for non stick characteristics during application of electrosurgery to tissue and bodily fluids. Openings in the treated surface through the partial coating are at the peaks of conductive sites to expose the metallic material or alloys thereof. The partial coating is a fluorinated polymer. The treated surface is a relatively even level that is not flat. The metallic material substrate is an alloy of stainless steel or nickel chrome. A mechanically deformed surface finish, plasma or vapor deposition on the substrate forms the conductive sites. A method of manufacturing the electrode has steps including preparing it the metallic conductor, making it with the conductive material having peaks above the valleys as conductive sites, applying the partial coating to it and treating the surface across the peaks and generally over the filled valleys of the partially coated electrically conductive electrode. Locating the openings among the valleys is a step. Treating may be mass finishing, such as vibratory or tumbling the partially coated electrodes with or without abrasive material media or polishing, buffing, surface grinding, abrasive belt grinding or sanding with abrasive material. Making the peaks and valleys can be by stamping, coining, burnishing, embossing, threading, tumbling, vibrating, shot peening, wire brushing, grit blasting, thermal spraying, with powder, with wire supplied to melt and be distributed, or with high velocity oxygen fuel and a nickel, cobalt alloy, stainless steel or a nickel chrome alloy. A manufacturing method for the electrode has coating a strip of metal with the low surface energy polymer and forming it in a stamping operation with a raw edge metal edge.