Topic
Ellipsometry
About: Ellipsometry is a research topic. Over the lifetime, 9995 publications have been published within this topic receiving 188928 citations.
Papers published on a yearly basis
1 / 2
Papers
Book•
1 Jan 1977
TL;DR: In this article, the polarization of light waves and propagation of polarized light through polarizing optical systems are discussed. But the authors focus on the application of ellipsometry in the field of measurement in ellipsometer systems.
Abstract: Preface. 1. The polarization of light waves. 2. Propagation of polarized light through polarizing optical systems. 3. Theory and analysis of measurements in ellipsometer systems. 4. Reflection and transmission of polarized light by stratified planar structures. 5. Instrumentation and techniques of ellipsometry. 6. Applications of ellipsometry. Appendix. Author index. Subject index.
4,682 citations
TL;DR: In this paper, Ellipsometry and Polarized Light are discussed in terms of polarized light and ellipsometry in the context of the International Journal of Optics (IJO).
Abstract: (1978). Ellipsometry and Polarized Light. Optica Acta: International Journal of Optics: Vol. 25, No. 3, pp. 270-271.
2,278 citations
Book•
1 Jan 2007
TL;DR: In this paper, the authors present an overview of the application of Spectroscopic Ellipsometry in real-time monitoring of thin-film growth and its application in real time monitoring of anisotropic materials.
Abstract: Foreword. Preface. Acknowledgments. 1 Introduction to Spectroscopic Ellipsometry. 1.1 Features of Spectroscopic Ellipsometry. 1.2 Applications of Spectroscopic Ellipsometry. 1.3 Data Analysis. 1.4 History of Development. 1.5 Future Prospects. References. 2 Principles of Optics. 2.1 Propagation of Light. 2.2 Dielectrics. 2.3 Reflection and Transmission of Light. 2.4 Optical Interference. References. 3 Polarization of Light. 3.1 Representation of Polarized Light. 3.2 Optical Elements. 3.3 Jones Matrix. 3.4 Stokes Parameters. References. 4 Principles of Spectroscopic Ellipsometry. 4.1 Principles of Ellipsometry Measurement. 4.2 Ellipsometry Measurement. 4.3 Instrumentation for Ellipsometry. 4.4 Precision and Error of Measurement. References. 5 Data Analysis. 5.1 Interpretation of (PSI, DELTA). 5.2 Dielectric Function Models. 5.3 Effective Medium Approximation. 5.4 Optical Models. 5.5 Data Analysis Procedure. References. 6 Ellipsometry of Anisotropic Materials. 6.1 Reflection and Transmission of Light by Anisotropic Materials. 6.2 Fresnel Equations for Anisotropic Materials. 6.3 4x4 Matrix Method. 6.4 Interpretation of (PSI, DELTA) for Anisotropic Materials. 6.5 Measurement and Data Analysis of Anisotropic Materials. References. 7 Data Analysis Examples. 7.1 Insulators. 7.2 Semiconductors. 7.3 Metals/Semiconductors. 7.4 Organic Materials/Biomaterials. 7.5 Anisotropic Materials. References. 8 Real-Time Monitoring by Spectroscopic Ellipsometry. 8.1 Data Analysis in Real-Time Monitoring. 8.2 Observation of Thin-Film Growth by Real-Time Monitoring. 8.3 Process Control by Real-Time Monitoring. References. Appendices. 1 Trigonometric Functions. 2 Definitions of Optical Constants. 3 Maxwell's Equations for Conductors. 4 Jones-Mueller Matrix Conversion. 5 Kramers-Kronig Relations. Index.
2,218 citations
1,778 citations
Book•
6 Jan 2005
TL;DR: Polarized Light and Ellipsometry: Optical Physics of Materials- Data Analysis for Spectroscopic Ellipsometers- Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer as mentioned in this paper.
Abstract: Polarized Light and Ellipsometry- Optical Physics of Materials- Data Analysis for Spectroscopic Ellipsometry- Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer- Rotating Polarizer and Analyzer Ellipsometry- Polarization Modulation Ellipsometry- Multichannel Ellipsometry- SiO2 Films- Theory and Application of Generalized Ellipsometry- VUV Ellipsometry- Spectroscopic Infrared-Ellipsometry- Ellipsometry in Life Sciences
1,525 citations
Related Topics (5)
Performance Metrics
| Year | Papers |
|---|---|
| 2025 | 74 |
| 2024 | 150 |
| 2023 | 239 |
| 2022 | 427 |
| 2021 | 183 |
| 2020 | 208 |