Topic
Diffraction-limited system
About: Diffraction-limited system is a research topic. Over the lifetime, 40 publications have been published within this topic receiving 434 citations.
Papers
TL;DR: In this paper, the authors proposed an optical Airy transform of fundamental Gaussian beams and finite energy Airy beams, which can be used to directly modulate the beam parameters of the incident Airy beam and transform it into the Gaussian beam.
36 citations
Patent•
12 Aug 1994
TL;DR: In this article, a filter consisting of a variable pitch circular grating in front of the focus lens is used to obtain a fraction of the theoretical spot size in a lens system.
Abstract: A fraction of the theoretical spot size in a lens system is obtained by applying a filter consisting of a variable pitch circular grating, in front of the focus lens. The focal point Image of a lens is a spot called an Airy disk. The diameter of the Airy disk is proportional to (wavelength)/(Numerical Aperture). Numerical aperture is equal to (1/2 of the diameter of the lens)/(focal length). This is the theoretical limit of spot size. Using a Bessel Transform, modified circular grating, filter the resulting first and higher order diffraction images lie on the optical axis and interfere resulting in a small beam spot at the focus surrounded by interference bands, producing a narrowed zero order beam for projection in optical and infrared applications.
25 citations
TL;DR: A spectral integral expression is derived to describe the Airy wave, which, in the paraxial limit, yields the freely accelerating, nondiffracting, and finite energy Airy beam.
Abstract: We identify a virtual source for generating an Airy wave. A spectral integral expression is derived to describe the Airy wave, which, in the paraxial limit, yields the freely accelerating, nondiffracting, and finite energy Airy beam. From the spectral representation of the Airy wave, the first two orders of nonparaxial corrections to the paraxial Airy beam are determined. Also, a connection between the obtained Airy wave and the well-known complex source point spherical wave is given.
23 citations
Patent•
14 Mar 1997TL;DR: In this article, an optical disc system with a light-transmitting cover and an objective lens for bundling or focusing a light beam on a recording layer of the optical disc is presented.
Abstract: An optical disc system uses an optical disc with a light-transmitting cover and an objective lens for bundling or focusing a light beam on a recording layer of the optical disc in order to perform recording and/or reproducing of information. The thickness of the light-transmitting cover falls within the range of 0.05 mm to 0.6 mm, the numerical aperture (NA) of the objective lens is set to fall within the range of 0.55 to 1.10, and the wavelength of the light beam is selected to be between 100 nm to 780 nm.
23 citations
TL;DR: In this paper, the phase-shifting point diffraction interferometer is used to measure and align these two-mirror, multilayer-coated Schwarzschild optical systems designed with a numerical aperture of 0.088 and operating at 13.4 nm wavelength.
Abstract: At-wavelength interferometric measurements of recently fabricated extreme ultraviolet (EUV) microstepper projection optics have revealed the highest performance for prototype EUV lithographic systems observed to date. The phase-shifting point diffraction interferometer is used to measure and align these two-mirror, multilayer-coated Schwarzschild optical systems designed with a numerical aperture of 0.088 and operating at 13.4 nm wavelength. Root-mean-square wave front error magnitudes as small as 0.60 nm have been achieved, actually exceeding the design tolerance set for these objectives.
18 citations
Related Topics (5)
Performance Metrics
| Year | Papers |
|---|---|
| 2019 | 1 |
| 2018 | 1 |
| 2017 | 4 |
| 2016 | 5 |
| 2015 | 2 |
| 2014 | 2 |