TL;DR: In this article, a bypass pipe is connected between the mechanical booster pump and the rest vacuum pumps located at a downstream side of the booster pump to prevent the exhaust gas from diffusing back to the inside of a process chamber.
Abstract: Process gas discharged from a bypass pipe to a gas exhaust system can be prevented from diffusing back to the inside of a process chamber without having to install a dedicated vacuum pump at the downstream side of the bypass pipe. The substrate processing apparatus includes a process chamber accommodating a substrate, a gas supply system supplying process gas from a process gas source to the process chamber for processing the substrate, a gas exhaust system configured to exhaust the process chamber, two or more vacuum pumps installed in series at the gas exhaust system, and a bypass pipe connected between the gas supply system and the gas exhaust system. The most upstream one of the vacuum pumps is a mechanical booster pump, and the bypass pipe is connected between the mechanical booster pump and the rest vacuum pumps located at a downstream side of the mechanical booster pump.
TL;DR: In this article, a method of refueling a road transportation vehicle or the like comprising receiving and storing liquid natural gas in a relatively large supply tank at relatively low temperature and moderate pressure, dispensing the liquid gas from the supply tank generally exclusively on demand when a vehicle is present for refueling, delivering the dispensed gas to a high-pressure fuel tank on the vehicle while simultaneously converting it to compressed natural gas at relatively high pressure and moderate temperature through the addition of energy to the gas primarily in thermal form.
Abstract: A method of refueling a road transportation vehicle or the like comprising receiving and storing liquid natural gas in a relatively large supply tank at relatively low temperature and moderate pressure, dispensing the liquid natural gas from the supply tank generally exclusively on demand when a vehicle is present for refueling, delivering the dispensed gas to a high-pressure fuel tank on the vehicle while simultaneously converting it to compressed natural gas at relatively high pressure and moderate temperature through the addition of energy to the gas primarily in thermal form. In one embodiment the pressure of the natural gas is elevated by a mechanical pump while in another embodiment the pressure of the natural gas is raised primarily by the addition of heat.
TL;DR: In this paper, a gas mixing apparatus includes a piston disposed within a pump chamber, and a flow limiting inlet controls introduction of a first selected gas such as oxygen for mixing with a second selected gas, such as air.
Abstract: The gas mixing apparatus provides the components of a breathing gas for mixing at approximately ambient atmospheric pressure, and regulates the pressure of a selected gas to approximately ambient atmospheric pressure for mixing with air at ambient atmospheric pressure. The gas mixing apparatus includes a piston disposed within a pump chamber. A flow limiting inlet controls introduction of a first selected gas such as oxygen for mixing with a second selected gas such as air. The pressure of the first selected gas is limited to an acceptable maximum pressure, so that even if a valve for admitting the first selected gas for mixing at ambient pressure fails, breathing gas will not be provided at an excessive pressure. A demand valve is alternatively provided for reducing the pressure of the first selected gas supplied before mixing, but a pressure sensor is also provided downstream of the demand valve for detecting failure of the demand valve, to shut off the supply of the first selected gas to prevent overpressurization.
TL;DR: In this article, an innovative energy recovery configuration that uses a motor-driven booster pump coupled to a Pelton turbine, the so-called PROP, instead of a single-component high-pressure feed pump is presented.
TL;DR: In this paper, a system for cooling hot section components of a gas turbine engine is described, which includes a plurality of compressors, or compression train, and an intercooler disposed between each adjacent pair of compressionors so as to achieve the desired pressure and temperature of cooling air at reduced shaft power requirements.
Abstract: A system for cooling hot section components of a gas turbine engine. The cooling system includes a plurality of compressors, or compression train, and an intercooler disposed between each adjacent pair of compressors so as to achieve the desired pressure and temperature of the cooling air at reduced shaft power requirements. The first stage of compression may be provided by the booster, or low pressure compressor, of the engine, with the first intercooler receiving all of the air discharging from the booster. After exiting the first intercooler, a first portion of the booster discharge air is routed to the engine high pressure compressor and a second portion is routed to an inlet of the second compressor of the cooling air compression train. The compressed, cooled air exiting the last, downstream one of the compressors is used for cooling at least a first hot section component of the engine.