Bio-FET

Abstract: A method of sensing biomolecules in an electrolyte solution by using a bio FET. When it is sensed that probe biomolecules are immobilized to a gate surface of the bio FET or that the probe biomolecules are hybridized with target biomolecules, a Debye length from the biomolecules having charges attached to the gate surface is controlled.

Abstract: Biosensor is a device that can be widely used in several type of field such as food, agriculture and human cell. The concept of the bio-molecule detection is due to the idea of immobilization and hybridization of the cell or nucleic acid on the transducer. Biosensor is mainly used in the detection of biological element such as nucleic acid, cancel cell and enzyme.

Abstract: A bioFET device includes a semiconductor substrate having a first surface and an opposite, parallel second surface and a plurality of bioFET sensors on the semiconductor substrate. Each of the bioFETsensors includes a gate formed on the first surface of the semiconductor substrate and a channel region formed within the semiconductor substrate beneath the gate and between source/drain (S/D) regions in the semiconductor substrate. The channel region includes a portion of the second surface of the semiconductor substrate. An isolation layer is disposed on the second surface of the semiconductorsubstrate. The isolation layer has an opening positioned over the channel region of more than one bioFET sensor of the plurality of bioFET sensors. An interface layer is disposed on the channel regionof the more than one bioFET sensor in the opening.