Baffle

Abstract: Apparatus for selectively blocking passage of lipids in a liquid flow path A baffle interposed in the liquid flow path is of nonpolar material and is arranged to permit liquid flow therethrough with contact of said liquid with the nonpolar material of the baffle for removing lipids from the flow In one embodiment, the baffle is interposed between the wound drain connection and vacuum connection in a drain reservoir and protects the hydrophobic filter which is at the end of the vacuum passage communicating with the interior of the drain reservoir bottle The baffle enables use of a nonpolar material for the hydrophobic filter and avoids coating and thereby clogging of the hydrophobic filter by lipids in the liquid drained from a wound

Abstract: A gas distribution system for uniformly or non-uniformly distributing gas across the surface of a semiconductor substrate. The gas distribution system includes a support plate and a showerhead which are secured together to define a gas distribution chamber therebetween. A baffle assembly including one or more baffle plates is located within the gas distribution chamber. The baffle arrangement includes a first gas supply supplying process gas to a central portion of the baffle chamber and a second gas supply supplying a second process gas to a peripheral region of the baffle chamber. Because the pressure of the gas is greater at locations closer to the outlets of the first and second gas supplies, the gas pressure at the backside of the showerhead can be made more uniform than in the case with a single gas supply. In one arrangement, the first and second gas supplies open into a plenum between a top baffle plate and a temperature controlled support member wherein the plenum is divided into the central and peripheral regions by an O-ring. In a second arrangement, the first gas supply opens into the central region above an upper baffle plate and the second gas supply opens into the periphery of a plenum between the upper baffle plate and a lower baffle plate.