Vertically isolated complementary transistor structures

TL;DR: In this article, a backfilled cavity was used to prevent the creation of oarasitic channels in complementary transistor devices, where the dopants in the first and second layers outdiffuse into the epitaxial layer and into the backfill material, respectively.

Abstract: A process for making complementary transistor devices - (11, 12) in an epitaxial layer (14) of a first conductivity type having a deep vertical isolation sidewall (21) between the N and P channel transistors by providing a backfilled cavity - (26) in the epitaxial layer, the sidewalls of the cavity being coated with layers of material, the first layer being a silicate doped with the same conductivity type as the epitaxial layer (14) and in contact with the epitaxial layer. The first layer is overcoated with an isolation and diffusion barrier layer (21). A second silicate layer is provided which is doped to a conductivity opposite to that of the first layer and isolated therefrom by said isolation and diffusion barrier material (21). The cavity (26) is backfilled with semiconductor material of a conductivity type opposite to that of the epitaxial layer (14) and during this backfilling operation the dopants in the first and second layer outdiffuse into the epitaxial layer and into the backfill material, respectively, to prevent the creation of oarasitic channels.