Journal Article10.1364/AO.22.001893
Three-beam interferometric profilometer.
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TL;DR: A noncontact optical technique for the measurement of thin-film thickness and surface roughness with 25-A and 2-μm vertical and horizontal resolutions, respectively, has been described.
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Abstract: A noncontact optical technique for the measurement of thin-film thickness and surface roughness with 25-A and 2-μm vertical and horizontal resolutions, respectively, has been described. It is based on a common-path three-beam shearing interferometer, in which the outer beams act as a reference while the middle beam scans the surface. The results of this technique are comparable with the ones obtained with a stylus instrument.
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Citations
Patent
Method and arrangement for optically determining surface profiles
Günter Makosch
- 23 Dec 1985
TL;DR: In this paper, a surface is subjected to a light field whose intensity is periodically modulated in a vertical direction to evaluate a scattered light pattern, where the light field is obtained from interference between a first or central beam with vertical incidence and two symmetrical laterally disposed beams with oblique incidence.
28
Generation of phase edge singularities by coplanar three-beam interference and their detection.
TL;DR: This paper presents the first general analysis of formation of phase edge singularities by coplanar three-beam interference, and proposes an automatic fringe pattern analysis technique for detecting phase edge dislocations, based on the continuous wavelet transform.
5
Spectral Interferometric Microscopy for Fast and Broadband Phase Characterization
TL;DR: In this article, a novel interferometric method for fast, broadband and microscopic phase characterization, based on common-path configuration, is introduced. But the method can be implemented by adding a simple optical relay to connect conventional microscope and imaging spectrometer.
5
Three-beam heterodyne interferometer
M.P. Kothiyal,Claude Delisle +1 more
TL;DR: In this article, a three-beam heterodyne interferometer was proposed for the measurement of optical phase, which was shown to be suitable for electronic measurement of phase change.
4
References
Improved Three-Beam Interferometric Method
R. C. Tyagi,Kehar Singh +1 more
TL;DR: Three-beam interference has been investigated, in order to obtain an intensity distribution that enables more accurate determination of small phase changes by photometric null setting criterion.
9
Three-beam interferometer
P Hariharan,D Sen +1 more
TL;DR: In this paper, a beam dividing system similar to that used in the Jamin interferometer, but employing three interfering beams instead of two, was used for determination of the fractional fringe order with an extremely high degree of accuracy.
A Precision Method for Measuring Small Phase Differences
TL;DR: The well-known diffraction figure of three equidistant slits may be considered as formed by the fringes of equal intensity caused by the outer slits, together with the coherent background from the middle slit, which alternately reinforces and suppresses these fringes.
A new interferometer capable of measuring small optical path differences.
TL;DR: The development of a new type of interferometer capable of measuring optical path differences of lambda/1000 or less and exhibiting an advantage of increased environmental stability over more conventional interferometers which depend upon optical path changes manifested as fringe shifts is reported.
Measurement of the rms roughness, autocovariance function and other statistical properties of optical surfaces using a FECO scanning interferometer.
TL;DR: A FECO scanning interferometer is described, which has been used to determine statistics of polished surfaces having roughnesses under 100 A rms and was found to have smaller rms slopes than other surfaces of comparable roughness and scattered less than predicted by simple scalar scattering theory.