Thermal type flowmeter

TL;DR: In this paper, the authors proposed a thermal flowmeter in which measurement output is prevented from being affected by the incident angle of a fluid, and internal leakage can be prevented by forming an elbow part with a bent at 90° angle for communicating a flow passage space with an inlet flow passage.

Abstract: PROBLEM TO BE SOLVED: To provide a thermal type flowmeter in which measurement output is prevented from being affected by the incident angle of a fluid, and internal leakage can be prevented SOLUTION: An elbow part 43A bent at 90° is formed in a communication part for communicating a flow passage space 44 with an inlet flow passage 44 A mesh part 51M is provided in a communication part for communicating a main flow passage M with the elbow part 45A The measurement output is precluded thereby from being affected by the incident angle A sensor substrate 21 is brought into close contact with a body 41 via seal packing 48 molded integrally with a ring part 48A and a sheet part 48B Both a leakage to the outside and an internal leakage of the fluid to be measured are prevented thereby COPYRIGHT: (C)2003,JPO