Journal Article10.1016/0378-5963(82)90018-6
Surface Modifications Due to Preferential Sputtering
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TL;DR: In this paper, changes of the surface composition of various compounds due to preferential sputtering as studied by low energy ion scattering (ISS) and Auger electron spectroscopy (AES) are presented.
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About: This article is published in Applications of Surface Science. The article was published on 01 Aug 1982. The article focuses on the topics: Low-energy ion scattering & Sputtering.
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Citations
Tridyn — A TRIM simulation code including dynamic composition changes
Wolfhard Möller,W. Eckstein +1 more
TL;DR: In this paper, a Monte Carlo code was developed to compute range profiles of implanted ions, composition profiles of the target, and sputtering rates for a dynamically varying target composition, taking into account compositional changes both due to the spatial distribution of target atoms deposited in collision cascades, and due to presence of the implanted ions.
638
Mechanisms and theory of physical sputtering by particle impact
TL;DR: In this paper, the authors summarized theoretical work on sputtering during the past decade, with the emphasis on elemental sputtering in the linear cascade and spike regimes as well as alloy sputtering.
302
Beam-induced broadening effects in sputter depth profiling
TL;DR: In this paper, the broadening effects encountered in sputter depth profiling are reviewed in some detail, focusing on cases where beam-induced microtopographical changes are of negligible importance.
156
Sputter reduction of oxides by ion bombardment during Auger depth profile analysis
TL;DR: In this article, the magnitude of preferential sputtering at 20°C was not a function of ion energy, mass or sputter rate over the range studied, and the results agree well with the predictions from the theoretical model of Kelly.
110
Bombardment-induced compositional change with alloys, oxides, oxysalts, and halides
TL;DR: In this article, it was shown that the BIS is caused by chemically guided final steps in some ballistic trajectories and that the driving force for segregation is so small, ranging from 0.06 eV to 0.52 eV for AuNi, and that for ambient temperature the inequality K b ⪡ K eq holds.
106
References
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
TL;DR: In this article, an integrodifferential equation for the sputtering yield is developed from the general Boltzmann transport equation, and solutions of the integral equation are given that are asymptotically exact in the limit of high ion energy as compared to atomic binding energies.
2.6K
Ion desorption by core-hole Auger decay
M. L. Knotek,Peter J. Feibelman +1 more
TL;DR: In this article, the core-hole Auger decay mechanism for impact-induced desorption has been investigated and shown to correlate with the ionization potential of the highest-lying atomic core levels.
1K
•Book
Methods of surface analysis
John M. Walls
- 01 Jan 1989
TL;DR: This introduction to the major techniques of surface analysis, written by specialists in the field with practical experience, includes the ways in which these techniques can be used to solve problems on surfaces, interfaces, thin films and surface coatings.
646
The depth resolution of sputter profiling
TL;DR: In this article, it is shown that the bulk radiation damage accompanying sputtering events sets ultimate limits to the depth resolution attainable in sputter profiling, and guidelines for selection of projectile species and energies to minimize such mixing are given and numerical estimates for attainable depth resolutions.
588