Patent
Sensor elements in multilayer ceramic tape structures
Gary W. Johnson,William A. Vitriol +1 more
- 27 Nov 1989
58
TL;DR: In this paper, a structure formed of a plurality of sheets which are laminated and fused together includes at least one sintered ceramic sheet formed from thermally fusible tape.
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Abstract: A structure formed of a plurality of sheets which are laminated and fused together includes at least one sintered ceramic sheet formed from thermally fusible tape A sensor element, such as a cantilever, circular diaphragm, rectangular diaphragm supported at least two sides, or microbridge, is formed as a part of the ceramic sheet A hole may be formed through one of the sheets adjacent to the ceramic sheet to expose the sensor element to an ambient environment which is to be sensed Electrical signals corresponding to a physical change in the sensor element such as stress or displacement are generated by piezoresistor, variable capacitor, photodetector, or the like attached to or formed on the sensor element, which is interconnected with a metallization pattern formed on at least one of the sheets The thickness of the sheets is highly uniform, thereby producing sensor elements with precisely reproducible thicknesses and mechanical properties
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Citations
Patent
System and method for the wireless sensing of physical properties
Mark G. Allen,Jennifer M. English +1 more
- 02 Apr 1998
TL;DR: In this paper, the physical properties of a sensor circuit are calculated from the resonant frequency and bandwidth of the sensor circuit using an impedance analyzer, a transmitting and receiving antenna system, or a chirp interrogation system.
201
Patent
System, method, and sensors for sensing physical properties
Mark G. Allen,Jennifer M. English +1 more
- 09 Apr 1998
TL;DR: In this article, the physical properties such as pressure, temperature, presence of a chemical species, or other conditions of a specific environment are calculated from the resonant frequency and bandwidth determined.
198
Patent
Low-temperature-cofired-ceramic (LTCC) tape structures including cofired ferromagnetic elements, drop-in components and multi-layer transformer
Carol Haertling,Andrew A. Shapiro,Charles A. Goodman,Ramona G. Pond,Robert D. Washburn,Robert F. Mcclanahan,Carlos H. Gonzalez,David M. Lusher +7 more
- 11 Oct 1995
TL;DR: A ferromagnetic material (18,20) in ink or tape form is sinterable using the same firing profile as and has approximately the same thermal shrinkage characteristics as low-temperature co-fired-ceramic (LTCC) tape, and is chemically non-reactive therewith.
180
Patent
Integrated multilayered microfludic devices and methods for making the same
Jeremy W. Burdon,Rong-Fong Huang,David Wilcox,Nicholas J. Naclerio,Cynthia Ann Gorsuch Briscoe,Piotr Grodzinski,Huinan Yu,Robert Marrero,Sean R. Gallagher,Yuk-Tong Chan,Barbara M. Foley,Xunhu Dai +11 more
- 21 Jun 1999
TL;DR: In this paper, a multilayered microfluidic device having a substantially monolithic structure is formed by sintering together a plurality of green-sheet layers, which can include electrically conductive pathways, heaters, fluid sensors, fluid motion transducers, and optically transmissive portions.
153
Patent
Multilayered microfluidic DNA analysis system and method
Cynthia Ann Gorsuch Briscoe,Huinan Yu,Piotr Grodzinski,Robert Marrero,Jeremy W. Burdon,Rong-Fong Huang +5 more
- 10 Jan 2003
TL;DR: In this article, a multilayered microfluidic DNA analysis system is provided as a substantially monolithic structure formed from a plurality of green-sheet layers sintered together.
101
References
Method of making a semiconductor transducer having multiple level diaphragm structure
TL;DR: In this article, a selectively etchable spacer material is employed when fabricating the diaphragm by forming successive layers of diaphrasm material over the spacer.
82
Patent
Improvements relating to temperature and/or strain gauges
Hannay Richard William
- 11 Oct 1967
TL;DR: In this article, a resistance strain gauge is provided with an adhesive coating for attachment to a surface to be investigated, which coating may be a synthetic resin protected by a "strip off" paper or plastics film.
3
Patent
Piezoelectric body for an electromechanical transducer
David Jacob Perduijn,Jacobus Verberkt +1 more
- 12 May 1980
TL;DR: In this article, a piezoelectric body for an electromechanical transducer consisting of Pb1-aMa(Mg(1-b)/3Mnb/3 Sb2/3)x TiyZrzO3, wherein M is one or more of the alkaline earth metals Ca, Sr and Ba, has been presented.
1
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