Patent
Scanning probe microscope
Hasegawa Takeshi,Shigeyuki Hosoki,Kono Makiko,真貴子 河野,茂行 細木,剛 長谷川 +5 more
- 09 Jul 1993
11
TL;DR: In this article, a mass spectrometer is installed in the rear of a probe, i.e., on the side opposite to a sample 2 by sandwiching the probe 1.
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Abstract: PURPOSE:To provide a scanning probe microscope which can simply identify a substance in a part to be analyzed on the surface of a sample at the spatial resolution of the SPM. CONSTITUTION:A mass spectrometer 5 is installed in the rear of a probe 1, i.e., on the side opposite to a sample 2 by sandwiching the probe 1. A part desired to be analyzed on the sample 2 is ionized by a pulse voltage from the probe 1, and ions impinge on an introduction part 7 to a mass analysis means. All driving mechanisms are installed on the side of the sample 2 so that the impingement of charged particles on the mass spectrometer 5 is not disturbed. Pulses which are synchormized with the pulse voltage applied to the probe 1 are output from the detection system of the mass spectrometer 5. The time delay of the pulse voltage applied to the probe and of the pulses output from the detector is measured by a time measuring circuit 6.
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Citations
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4