Patent
Scanning probe microscope
Masato Iyoki,Naokatsu Nosaka,Hiroumi Momota,Junji Kuwahara +3 more
- 31 Jul 1998
17
TL;DR: In this article, a scanning probe microscope including a cantilever, a three-dimensional moving mechanism moving a sample stage in three dimensions, and a measurement chamber sealed not to be exposed to external air is described.
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Abstract: Disclosed herein is a scanning probe microscope including a cantilever, a three-dimensional moving mechanism moving a sample stage in three dimensions, and a measurement chamber sealed not to be exposed to external air At least the cantilever, the sample stage, and the three-dimensional moving mechanism are accommodated in the measurement chamber The measurement chamber is provided with a pair of guide rails used to transport the sample stage The sample stage has an engagement portion The three-dimensional moving mechanism is disposed in the vicinity of a predetermined position and between the guide rails The three-dimensional moving mechanism can be moved to above the guide rails and below the guide rails When the sample stage is transported to the predetermined position in a horizontal direction, the three-dimensional moving mechanism is lifted up to the bottom surface of the sample stage so that the scanning probe microscope can perform measurement
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Citations
Patent
Optical inspection probe
Nicholas John Weston,Alexander David Mckendrick +1 more
- 19 May 2009
TL;DR: An optical inspection probe as mentioned in this paper consists of an imaging assembly for capturing an image of an object and an illumination assembly for producing a light beam directed toward the object, which is configured such that the light beam converges to a focal point at a first focal plane.
17
Patent
Scanning-type probe microscope
Akira Egawa,Tatsuya Miyatani,Kunio Nakajima,邦雄 中島,竜也 宮谷,明 江川 +5 more
- 04 Mar 1999
TL;DR: In this article, the authors proposed to obtain high detection sensitivity without fixing a probe and a piezoelectric body in one piece by flexibly pinching the probe with first and second elastic bodies.
17
Patent
Optical displacement-detecting mechanism and probe microscope using the same
Masato Iyoki,Hiroyoshi Yamamoto,Kazutoshi Watanabe +2 more
- 17 Aug 2007
TL;DR: In this article, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.
11
Patent
Scanning probe microscope
Toshio Ando,Mitsuru Sakashita,Takayuki Uchihashi +2 more
- 05 Jun 1992
TL;DR: In this paper, a scanning type probe microscope for measuring a surface state of a sample by scanning the sample by use of a probe is disclosed, where the sample is inclined relative to a scan direction of the probe by a inclination mechanism.
11
Patent
Microscope and observation method
Katsumasa Fujita,Shogo Kawano,Masahito Yamanaka,Satoshi Kawata +3 more
- 08 Feb 2011
TL;DR: In this paper, a nonlinear region where intensities of the light and signal light have a non-linear relation due to occurrence of saturation or nonlinear increase of the signal light when the light has a maximum intensity was obtained.
11
References
Patent
Scanning tunneling microscope
Gerd Binnig,Heinrich Rohrer +1 more
- 12 Sep 1980
TL;DR: In this paper, a fine tip is raster scanned across the surface of a conducting sample at a distance of a few Angstroms, and the vertical separation between the tip and sample surface is automatically controlled so as to maintain constant a measured variable which is proportional to the tunnel resistance, such as tunneling current.
Patent
Scanning probe microscope
Frederick I. Linker,Michael D. Kirk,Peter R. Swift,John Alexander,Sang-Il Park,Sung-Il Park,Ian R. Smith,David M. Parish,Jeong Ho Lee,Rebecca S. Howland +9 more
- 12 Mar 1993
TL;DR: In this article, a scanning probe microscope has been described, which includes a linear position-sensitive photodetector in the deflection sensor and a motorized, non-stacked x,y coarse movement stage.
243
Patent
Integrated scanning tunneling microscope
Thomas R. Albrecht,Mark Zdeblick +1 more
- 26 Jan 1989
TL;DR: In this paper, an integrated scanning tunneling microscope and an integrated piezoelectric transducer are presented, where the bimorph cantilevers have tips with sharp points formed thereon which are moved by the action of the control circuit (88) and the Bimorphs so to stay within a very small distance of a conducting surface.
121
Patent
High precision calibration and feature measurement system for a scanning probe microscope
Donald A. Chernoff,Jason D. Lohr +1 more
- 04 Mar 1996
TL;DR: In this article, the authors present an approach for the calibration of a scanning probe microscope under computer control using an average cross-section of the scan in order to simplify the calculation and improve the signal-to-noise ratio.
117
Patent
Active probe for an atomic force microscope and method of use thereof
Dennis M. Adderton,Stephen C. Minne +1 more
- 03 Mar 2000
TL;DR: In this paper, a self-actuated Z position cantilever with a Z position actuator and an oscillator is used for high-speed imaging and accurate Z position measurements.
115
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