Scanning electron microscope

Patent

Scanning electron microscope

- 16 Jun 1986

270

TL;DR: In this article, negative voltage is applied to a grid stretched at a small distance from the under surface of the object lens of a scanning electron microscope so as to cover the under-surface.

Abstract: PURPOSE:To remove influence due to a reflective electron, from a secondary electron image on a sample surface by applying negative voltage to a grid stretched at a small distance from the under surface of the object lens of a scanning electron microscope so as to cover the under surface. CONSTITUTION:A grid 8 is stretched at a small distance from the under surface of an object lens 3 in a scanning electron microscope along said under surface so as to cover other parts except a lens opening 4 and the negative voltage is applied to the object lens 3 set at the earth potential. The secondary electron emitted from the spots other than a sample surface 6 on account of the electron reflected from the sample 6 is blocked by a grid 8 and only the secondary electron from the sample 6 is made incident in a secondary electron detector 2. Therefore, the secondary electron image on the cathode-ray tube is defined to only the information from the sample surface and the S/N ratio of the electron microscope can be improved.

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