Patent
Pressure sensor device
Suzu Soichiro
- 21 Aug 2020
TL;DR: In this paper, a pressure sensor device with external connection terminals, a second board stacked on an upper surface of the first board and including a first through hole and a second through hole, and a cover that is mounted on the second board to cover the pressure sensor element is presented.
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Abstract: A pressure sensor device of the present invention includes a first board including external connection terminals, a second board stacked on an upper surface of the first board and including a first through hole and a second through hole, a pressure sensor element including a diaphragm structure and mounted on an upper surface of the second board such that the first through hole is closed by the diaphragm structure, and a cover that is mounted on the upper surface of the second board to cover the pressure sensor element and in which a first channel for guiding a first fluid to an upper surface of the diaphragm structure is formed. A second channel is formed between the first board and the second board to lead from the second through hole to the first through hole and guide a second fluid to a lower surface of the diaphragm structure.
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References
Patent
Modular diaphragm pressure sensor with peripherally mounted electrical terminals
Brian D. Lewis
- 06 Jun 1995
TL;DR: A modular pressure sensor has a pressure-sensing element, electrical terminals, interconnections, and a support substrate as discussed by the authors, which produces an electrical signal indicative of pressure at local contacts and applies the signal to the electrical terminals.
54
Patent
Semiconductor pressure sensor
Takashi Takizawa,Tatsuo Suemasu,Satoshi Yamamoto +2 more
- 18 Nov 2003
TL;DR: In this paper, the semiconductor pressure sensor includes a substrate and a diaphragm, which is displaceable by a pressure medium acting on a side of the substrate.
48
Patent
Resistive strain gauge pressure sensor
James R. Kremidas
- 06 Aug 1991
TL;DR: In this article, a resistive strain gauge pressure sensor including upper and lower housings coacting to define a pressure chamber within the housing is presented, where a board member is clamped between the housings and defines a diaphragm portion which extends across the pressure chamber to divide the pressure chambers into upper and upper chamber portions.
35
Patent
Semiconductor pressure sensor and manufacturing method therefor
Hachiman Naoki
- 29 Nov 2012
TL;DR: In this article, the authors proposed a semiconductor pressure sensor that efficiently prevents fluid from interfering with an atmosphere introduction opening by using a case 10, a tubular atmospheric pressure introduction section 10c, and a plurality of concave parts 16.
8
Patent
Semiconductor sensor and mounting structure
Umeda Fumihiko,Yoshiyuki Morita,Sotodani Takashi,Furusawa Koichi,Yamaguchi Koji,Hara Kentaro,Masai Migaku +6 more
- 21 Jan 2000
TL;DR: In this article, the outside dimension of an externally connected substrate 5 is slightly larger than that of a pressure sensitive chip 1, and the overall joining parts of the externally-connected substrate 5, insulating substrate 2 and pressure-sensitive chip 1 are sealed by a mold resin 10.
5