Patent
Pressure-insensitive mass flow controller
Balarabe N. Mohammed,Barros Phillip,Raul A. Martin,Mark Crockett,Sklar Eric S +4 more
- 23 Feb 2007
6
TL;DR: In this article, a method of preventing a mass flow controller from participating in crosstalk in an array of mass flow controllers is described, which includes sensing and providing a signal indicative of a fluid pressure inside of a Mass Flow Controller with a pressure sensor.
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Abstract: A method of preventing a mass flow controller from participating in crosstalk in an array of mass flow controllers is described. The method includes sensing and providing a signal indicative of a fluid pressure inside of a mass flow controller with a pressure sensor contained within the mass flow controller, determining a response of a control valve to a rapid pressure perturbation at the inlet of the mass flow controller using the signal indicative of the fluid pressure to avoid overcompensation for the rapid pressure perturbation, and adjusting a control valve contained within the mass flow controller downstream of the pressure sensor, based on the determined response, so that the mass flow controller avoids overcompensating for the rapid pressure perturbation. The pressure sensor is positioned such that the pressure sensor is sensitive to rapid pressure perturbations at the inlet of the mass flow controller.
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Citations
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Operation method for flow sensor device
Hornung Mark
- 03 Jan 2019
TL;DR: In this article, a flow sensor device with a first sensor arrangement for measuring a flow of a fluid (g) and a further first fluid property (p1), and with a second sensor arrangement (12) for determining a further second fluid property(p2) was presented.
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TL;DR: In this paper, a mass flow controller (10) comprises a fluid inlet (15) and at least one first flow meter (11,12) to measure a first flow rate (F 1 ) and output first flow signal (F S 1 ); at least second flow meter(12,13) to output a second flow rate and a control device (13) connected to said first and second flow meters and configured and arranged to generate a control signal (C ).
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References
Patent
System and method for a mass flow controller
John M. Lull,Chiun Wang,William S. Valentine,Joseph A. Saggio +3 more
- 24 Apr 2002
TL;DR: In this article, a system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controllers is presented.
202
Patent
Method for wide range gas flow system with real time flow measurement and correction
Timothy R. Brown
- 26 May 1999
TL;DR: In this paper, a gas delivery system accurately measures and optionally regulates mass flow rate in real time, where a fluid conduit connects an inlet valve, calibration volume, flow restrictor, and outlet valve in series.
195
Process device diagnostics using process variable sensor signal
TL;DR: In this article, a process variable sensor (138) senses vibration noise signals (132) carried in a process fluid of the process, such as by operation of process control elements, and analyzes the isolated signal to diagnose the process and the process devices.
195
Patent
Pressure controller and method
Emmanuel Vyers,William Ballard,David Kruse,Sean Mallory,Per Cederstav +4 more
- 15 Dec 2000
TL;DR: In this article, a closed-loop motor control of the valve is proposed to more accurately position the valve, and accordingly enhances the overall precision and allowable loop-gain of the pressure control system by providing the valve drive with feedback as to the actual angular position of a valve in extremely high resolution.
142
Patent
Intelligent mass flow controller
Richard L. Anderson
- 24 Sep 1991
TL;DR: An intelligent mass flow controller for controlling the mass flow of gas to a semiconductor processing chamber is described in this article, where a microcontroller which includes a CPU, signal processing and software routines continually monitors the various parameters and provides "on the fly" corrections, as well as providing diagnostics and record retention.
134