Phase shifting interferometric imaging ellipsometer
Conrad Wells,James C. Wyant +1 more
- 03 Oct 1997
- Vol. 3121, pp 13-18
TL;DR: In this paper, a modified Michelson interferometer is used in conjunction with a Wollaston prism to generate two interferograms with orthogonal polarization states, and the fringe modulation is used to calculate the ellipsometric parameter.
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Abstract: An imaging ellipsometer has been developed which employs phase shifting interferometry to characterize the ellipsometric parameters. Polarized light from a laser or incoherent source is collimated and reflected off of the surface under test. A modified Michelson interferometer is used in conjunction with a Wollaston prism to generate two interferograms with orthogonal polarization states. Subtraction of the phases in the two interferograms yields the ellipsometric parameter (Delta) . The fringe modulation of the two interferograms is used to calculate the ellipsometric parameter (Psi) . The instrument uses imaging optics to image the surface under test to a CCd, yielding a truly two dimensional ellipsometric measurement. The deign of the instrument and result of measurement will be presented.
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Citations
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References
V Phase-Measurement Interferometry Techniques
TL;DR: The phase modulation in an interferometer can be induced by moving a mirror, tilting a glass plate, moving a grating, rotating a half-wave plate or analyzer, using an acoustooptic or electro-optic modulator, or using a Zeeman laser as mentioned in this paper.
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Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry.
Joanna Schmit,Katherine Creath +1 more
TL;DR: The new 5-frame algorithm and two new 6-frame algorithms have smaller phase errors caused by phase-shifter miscalibration than any of the common 3-, 4- or 5- frame algorithms.
Dynamic imaging microellipsometry: theory, system design, and feasibility demonstration.
TL;DR: The DIM concept is based on radiometric polarizer, compensator, specimen, and analyzer ellipsometry combined with video and image processing techniques, and the theoretical basis for this approach is developed using the Jones vector and matrix formalisms.
59
Real time interferometric ellipsometry with optical heterodyne and phase lock-in techniques.
TL;DR: A Mach-Zehnder interferometer and an optical heterodyne is combined using an AO modulator to set up an interferometric ellipsometer for measuring the optical properties of metal surfaces with great accuracy.
42
Fringe modulation characterization for a phase-shifting imaging ellipsometer
Conrad Wells,James C. Wyant +1 more
- 01 Nov 1997
TL;DR: In this paper, a modified Michelson interferometer is used in conjunction with a Wollaston prism to generate two interferograms with orthogonal polarization states, which are then used to characterize the ellipsometric parameters.
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