Patent
Optical element for correcting non-uniform diffraction efficiency in a binary diffractive optical element
Ellis D. Harris
- 27 Dec 1994
18
TL;DR: In this paper, a first binary diffractive optical element has a multi-level surface relief phase grating structure on a substrate, and the diffraction efficiencies for all the regions of the optical element are reduced region by region to the common value of the lowest measured diffraction efficiency.
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Abstract: A first binary diffractive optical element has a multi-level surface relief phase grating structure on a substrate. The first binary diffractive optical element can be divided into regions commensurate with resolution requirements of the intended optical application and the diffraction efficiency of each region of the binary diffractive optical element measured. The lowest measured diffraction efficiency for a region of the first binary diffractive optical element will be taken as the reference efficiency. The diffraction efficiencies for all the regions of the binary diffractive optical element will be reduced region by region to the common value of the lowest measured diffraction efficiency by introducing compensating diffractive losses to the regions by a second, corrector binary diffractive optical element which has a binary surface relief phase grating structure on a substrate. By closely spacing the two binary diffractive optical elements in the optical path of an incident light beam, the resulting diffracted beam will have a uniform diffraction efficiency.
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Citations
Patent
Diffractive optical element
Hiroyuki Ishii
- 18 Jan 2000
TL;DR: A diffractive optical element has a plurality of step-like patterns each having surface levels of a number less than eight, the steplike patterns being disposed in combination to provide a function of a steplike structure of eight or more levels.
105
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Michael Graupe,Palmer James T,David J. Aldous,Sukanthini Thurairatnam +3 more
- 16 Sep 2002
TL;DR: The present invention relates to novel selective cathepsin S inhibitors, the pharmaceutically acceptable salts and Noxides thereof, their uses as therapeutic agents and the methods of their making as mentioned in this paper.
33
Patent
Diffractive optical element and method of manufacture of the same
Nakabayashi Masaaki,Junji Terada,Hayashi Senichi +2 more
- 23 Sep 1999
TL;DR: In this paper, a diffractive optical element having plural diffraction grating surfaces accumulated, where a pair of diffraction surfaces are positioned so that a protrusion and/or a recess formed on an outside of one diffraction surface engages with a recess forming on the outside of another, is defined on materials having different refractive indices and different dispersions.
19
Patent
Diffractive optical element
Hideki Sato
- 06 Jun 2001
TL;DR: In this paper, a diffractive element includes a first diffractive optical part having a phase type diffractive grating, and a second diffractive component having a different grating formed of a material differing from that of the first component.
15
Patent
Dual sided lithographic substrate imaging
Keith Frank Best,Joseph J. Consolini,Shyam Shinde +2 more
- 24 Nov 2004
TL;DR: A device manufacturing method capable of imaging structures on both sides of a substrate, is presented in this article, where the reversed alignment markers may comprise normal alignment patterns overlaid with mirror imaged alignment patterns.
15
References
Patent
High-efficiency, multilevel, diffractive optical elements
Gary J. Swanson,Wilfrid B. Veldkamp +1 more
- 21 Sep 1987
TL;DR: In this article, a photoresist layer on an optical element substrate is exposed through the first mask and then etched, and the process is repeated for the second and subsequent masks to create a multistep configuration.
392
Patent
Wobble correction lens with binary diffractive optic surface and refractive cylindrical surface
Patrick Y. Maeda
- 24 Dec 1991
TL;DR: In this paper, a plano-cylindrical lens with a diffractive surface is used to flatten the cross-scan field curvature of the plano cylindrical lenses.
192
Patent
Lens cover assembly for binary diffractive optic lenses
Ellis D. Harris,Steven A. Buhler +1 more
- 23 Dec 1991
TL;DR: In this article, a plurality of binary diffractive optic lenses are formed within a corresponding plurality of recesses in the surface of one substrate by dicing the two bonded substrates.
32
Binary Optics Technology: The Theory and Design of Multi-Level Diffractive Optical Elements
G. J. Swanson
- 14 Aug 1989
TL;DR: In this paper, the theory, design and fabrication of multi-level diffractive profiles are described in detail, and basic examples illustrate the potential usefulness, as well as the limitations of these elements.