Patent
Optical alignment control method and optical alignment equipment
Zhou Chang,Luo Wen,Zhu Shucun +2 more
- 09 Jan 2018
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TL;DR: In this paper, an optical alignment control method and optical alignment equipment is described, in which a deflection value of a motion table relative to a polarizing illumination device is detected, so a dynamically-weighted polarized axis angle error of a baseplate is acquired; and hence, a rotation angle of the rotation table which drives the baseplate to rotate can be controlled, control accuracy of a polarized angle can be effectively increased during optical alignment, and accuracy of an alignment angle formed in an alignment film can be ensured.
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Abstract: The invention provides an optical alignment control method and optical alignment equipment. The optical alignment control method is characterized in that a deflection value of a motion table relativeto a polarizing illumination device is detected, so a dynamically-weighted polarized axis angle error of a baseplate is acquired; and hence, a rotation angle of the rotation table which drives the baseplate to rotate can be controlled, control accuracy of a polarized axis angle can be effectively increased during optical alignment, and accuracy of an alignment angle formed in an alignment film canbe ensured.
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Citations
Patent
Optical alignment equipment
Li Renpeng
- 07 Dec 2018
TL;DR: In this paper, an optical alignment equipment consisting of a light source, a light hood, a first polarizing device and a first optical diaphragm is described. But the alignment process is not described.
Patent
Optical alignment device and replacement method for lamp thereof
Zhu Shu-Cun
- 05 Dec 2019
TL;DR: An optical alignment device and a replacement method for a lamp thereof is presented in this paper. But the authors do not specify a replacement mechanism for the lamp itself, only a replacement of the lamp.
References
Patent
Polarized light irradiation apparatus and method for photo-alignment
Junji Kimura
- 21 Jan 2015
TL;DR: In this article, a polarized light irradiation apparatus and method for photo-alignment is presented, which is capable of detecting the direction of a polarization axis of irradiated polarized light in high precision.
12
Patent
Device and method for detecting geometric errors of single-axis motions of machine tool
Peng Weichao,Wang Sujuan,Chen Xindu,Xia Hongjian,Ouyang Xiangbo,Wang Han,Li Ketian,Liu Qiang +7 more
- 04 Mar 2015
TL;DR: In this article, a method for detecting geometric errors of single-axis motions of a machine tool is presented, which consists of a processor, a laser interferometer, an interference mirror unit, a bracket and a fixed platform.
11
Patent
Polarized light irradiation device
悠生 上嶋,Hisao Uejima,田中 米太,Yoneta Tanaka,米太 田中,英樹 藤次,Hideki Fujitsugu +6 more
- 31 Mar 2014
TL;DR: In this article, the authors proposed a method to detect the occurrence of yawing in a polarized light irradiation device conveying a substrate loaded on a stage to an irradiation surface of polarized light to enable a contribution of improvement in a yield.
8
Patent
Polarized irradiation device for optical orientation
Hashimoto Kazushige,Arai Toshinari,Tomisuka Kichihiro +2 more
- 16 Jul 2014
TL;DR: In this article, the utility model provides a polarized irradiation device for optical orientation, where the performance deterioration of a wire grid polarizer or a specific-wavelength selective filter can be inhibited even though the polarization device used for a long time.
5
Patent
Liquid crystal device
Matsumoto Kenji
- 10 Jan 2013
TL;DR: In this paper, the alignment control and phase control in a liquid crystal device modulating a light wave by birefringence of liquid crystal, and to allow compensation for residual bireringence even when it occurs, is discussed.
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