Multiphoton polymerization using optical trap assisted nanopatterning
Karl-Heinz Leitz,Yu-Cheng Tsai,Florian Flad,Eike Schäffer,Ulf Quentin,Ilya Alexeev,Romain Fardel,Craig B. Arnold,Michael Schmidt +8 more
TL;DR: In this article, the combination of multiphoton polymerization and optical trap assisted nanopatterning (OTAN) was used for additive manufacturing of structures with nanometer resolution.
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Abstract: In this letter, we show the combination of multiphoton polymerization and optical trap assisted nanopatterning (OTAN) for the additive manufacturing of structures with nanometer resolution. User-defined patterns of polymer nanostructures are deposited on a glass substrate by a 3.5 μm polystyrene sphere focusing IR femtosecond laser pulses, showing minimum feature sizes of λ/10. Feature size depends on the applied laser fluence and the bead surface spacing. A finite element model describes the intensity enhancement in the microbead focus. The results presented suggest that OTAN in combination with multiphoton processing is a viable technique for additive nanomanufacturing with sub-diffraction-limited resolution.
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Figures
FIG. 3. Features generated by OTAN-MP with 3.5 lm polystyrene microbeads in NOA84: (a) line of voxels ( d ¼ 390640 nm); (b) line of voxels ( d ¼ 83611 nm); (c) single voxel (d¼ 80 nm); (d) partly detached voxel. 
FIG. 2. Optical trap assisted multi-photon polymerization: polystyrene microbead (d¼ 3.5 lm) in NOA84 trapped by a cw laser (k¼ 1064 nm), polymerization is induced by single femtosecond laser pulses (s¼ 120 fs, k¼ 800 nm): (a) trapped bead above the substrate surface during structuring; (b) generated “LPT” pattern on the substrate surface (LPT = Lehrstuhl f€ur Photonische Technologien / Chair of Photonic Technologies); (c) inner glass structures fabricated without a bead by the femtosecond laser focus beneath the substrate surface. 
FIG. 5. Finite element simulation of intensity enhancement beneath polystyrene microbead (d¼ 3.5 lm) in NOA84 irradiated with a wavelength of k¼ 800 nm. The simulation shows one quarter of the bead, as symmetry in x-z- and y-z-plane was assumed: (a) intensity distribution S=S0, (b) squared intensity distribution ðS=S0Þ2. 
FIG. 1. Optical trap assisted multi-photon polymerization: principle and ex- 
FIG. 4. Arrays of voxels generated by OTAN-MP with 3.5 lm polystyrene microbeads in NOA84, from left to right the distance between bead and substrate was reduced in steps of 160 nm: (a) 90 J=m2, (b) 70 J=m2, (c) size analysis.
Citations
Optically Induced Nanostructures : Biomedical and Technical Applications
Karsten König,Andreas Ostendorf +1 more
- 31 Jan 2015
TL;DR: The use of femtosecond laser microscopes and nanoscopes as novel nanoprocessing tools is discussed in this article, with an introduction to nonlinear optical processes associated with very short laser pulses for the generation of structures far below the classical optical diffraction limit of about 200 nanometers.
Femtosecond Laser-Induced Two-Photon Polymerization of Inorganic-Organtic Hybrid Materials for Applications in Photonics
J. Serbin
- 01 Jan 2003
TL;DR: In this article, two-photon polymerization of inorganic-organic hybrid materials initiated by femtosecond Ti:sapphire laser pulses is performed. And first applications of this technique for the fabrication of three-dimensional microstructures and photonic crystals in inorganicorganic hybrid polymers with a structure size down to 200 nm and a periodicity of 450 nm are discussed.
17
Optical trap assisted sub diffraction limited laser structuring
Ilya Alexeev,Ulf Quentin,Karl-Heinz Leitz,Johannes Strauß,M. Baum,Florian Stelzle,Michael Schmidt +6 more
- 23 Jun 2015
TL;DR: In this paper, the authors describe the principle of optical trap assisted nanostructuring and present simulated and experimental results demonstrating the potential and limitations of this innovative nanoscale optical material processing technology.
1
Non-spherical particles for optical trap assisted nanopatterning.
TL;DR: This work examines how the geometry of the bead affects the focus of the light through a combination of experiments and simulations and realizes nanopatterning using non-spherical dielectric particles to shape the light-material interaction.
3D Nanophotonic device fabrication using discrete components
Jeffrey E. Melzer,Euan McLeod +1 more
TL;DR: In this article, the authors review the most promising technologies that build structures using the placement of discrete components, focusing on laser-induced transfer, light-directed assembly, and inkjet printing.
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