Open AccessBook
Microsystem Technology and Microrobotics
Sergej Fatikow,Ulrich Rembold +1 more
- 20 Mar 1997
159
TL;DR: This is a basic introduction to MST, the first of its kind to cover MST in its entirety, including a survey of recently built products and recent developments.
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Abstract: From the Publisher:
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electrical, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household, and many other purposes. This is a basic introduction to MST. Well-illustrated, it is the first of its kind to cover MST in its entirety, including a survey of recently built products and recent developments.
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Citations
Recent advances in nanorobotic manipulation inside scanning electron microscopes.
Chaoyang Shi,Devin K. Luu,Qinmin Yang,Jun Liu,Jun Chen,Changhai Ru,Shaorong Xie,Jun Luo,Ji Ge,Yu Sun +9 more
TL;DR: This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomonipulation-enabled applications and discoveries.
Micropneumatic Digital Logic Structures for Integrated Microdevice Computation and Control
TL;DR: In this article, it was shown that polydimethylsiloxane membrane valve structures can be configured to function as transistors in pneumatic digital logic circuits (AND, OR, NOT, NAND, and XOR).
79
Optical properties and mechanical stress in SiO2/Nb2O5 multilayers
TL;DR: In this paper, the formation of stress-controlled reflection layers which are suitable for application on micromechanical elements without bending them out of shape was studied, and the authors found magnetron-sputtered chromium films most suitable for that purpose since they provided the highest line stress in comparison to their additional mass per area.
75
Ion-selective light-addressable potentiometric sensor (LAPS) with chalcogenide thin film prepared by pulsed laser deposition
Yulia Mourzina,Tatsuo Yoshinobu,Juergen Schubert,Hans Lüth,Hiroshi Iwasaki,Michael J. Schöning +5 more
TL;DR: In this article, a Pb 2+ -ion-sensitive transducer was used to detect Pb-Ag-As-I-S chalcogenide glass on the surface of a light-addressable potentiometric sensor.
72
Multi-Dimensional MEMS/Micro Sensor for Force and Moment Sensing: A Review
TL;DR: An overview of MEMS/micro-F/M sensors can be found in this article, where the authors evaluate different F/M sensing principles, recent advances in various designs and their significance and limitations are analyzed through specific examples.
64
References
•Book
Self Organization And Associative Memory
Teuvo Kohonen
- 01 Jan 1984
TL;DR: The purpose and nature of Biological Memory, as well as some of the aspects of Memory Aspects, are explained.
9.8K
•Book
Introduction To The Theory Of Neural Computation
John Hertz,Anders Krogh,Richard G. Palmer +2 more
- 01 Jan 1991
TL;DR: This book is a detailed, logically-developed treatment that covers the theory and uses of collective computational networks, including associative memory, feed forward networks, and unsupervised learning.
8.1K
•Book
Perceptrons: An Introduction to Computational Geometry
Marvin Minsky,Seymour A. Papert +1 more
- 01 Jan 1969
TL;DR: The aim of this book is to seek general results from the close study of abstract version of devices known as perceptrons.
3.8K
Applying a flexible microactuator to robotic mechanisms
TL;DR: A flexible microactuator (FMA) driven by an electropneumatic (or electrohydraulic) system has been developed in this paper, with three degrees of freedom-pitch, yaw, and stretch.
322
A micromachined silicon sieve electrode for nerve regeneration applications
TL;DR: A micromachined silicon sieve electrode has been developed and fabricated to record from and stimulate axons/fibers of the peripheral nervous system by utilizing the nerve regeneration principle, and the electrodes were implanted between the cut ends of peripheral taste fibers of rats.
169