Proceedings Article10.1109/PESC.1995.474889
Microfabrication process for high-frequency power-conversion transformers
Charles R. Sullivan,Seth R. Sanders +1 more
- 18 Jun 1995
- Vol. 2, pp 658-664
36
TL;DR: In this paper, a process for microfabrication of transformers for high-frequency power conversion applications is described, which uses multilayer films of NiFe/SiO/sub 2/ magnetic material and copper coils deposited on a silicon substrate.
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Abstract: A process for microfabrication of transformers for high-frequency power conversion applications is described. The process uses multilayer films of NiFe/SiO/sub 2/ magnetic material and copper coils deposited on a silicon substrate. Transformers less than 100 /spl mu/m thick are designed to handle 1.7 W each in an area 1.5 by 5.4 mm. Coil measurements confirm predicted DC and AC resistance. Applications to a 10 W, 10 MHz DC-DC power converter are discussed. >
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Citations
Review of Microscale Magnetic Power Generation
TL;DR: The history, current state of the art, and ongoing challenges for compact (less than a few cubic centimeters) magnetic power generation systems in the microwatts to tens of watts power range are discussed.
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Design of microfabricated inductors
Luca Daniel,Charles R. Sullivan,Seth R. Sanders +2 more
- 23 Jun 1996
TL;DR: In this article, a design methodology based on a simple model is proposed for a 5 MHz buck power converter application is presented, and a power density of 12.8 W/cm/sup 2/ is achieved for an efficiency of 94%.
Ultralow-profile micromachined power inductors with highly laminated Ni/Fe cores: application to low-megahertz DC-DC converters
Jin-Woo Park,Mark G. Allen +1 more
TL;DR: In this paper, the magnetic core of the fabricated inductor has 72 laminations of 1-/spl mu/m-thick Ni/Fe films and the inductor dimension is 11.7 mm, and the dc resistance is 150 m/spl Omega/
85
Measured performance of a high-power-density microfabricated transformer in a DC-DC converter
Charles R. Sullivan,Seth R. Sanders +1 more
- 23 Jun 1996
TL;DR: In this paper, experimental measurements are reported on micro-fabricated power conversion transformers using a simplified "sandwich" process, which achieves a power-handling density of 22.4 W/cm/sup 2/ at 61% efficiency.
53
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Planar magnetic device
Toshiro Sato,Mizoguchi Tetsuhiko +1 more
- 05 Sep 1996
TL;DR: In this paper, a planar magnetic device is proposed to reduce the high-frequency loss in the coil conductor by using a plurality of conductor lines in the form of a spiral, and the planar coil is interposed between two insulating layers which are sandwiched between two soft magnetic layers.
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