Patent
Method of processing objects comprising a surface portion made of an insulator
Kameyama Kojiro,Okayama Yoshio,Akira Suzuki,Mitsuo Umemoto +3 more
- 30 Nov 2005
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About: The article was published on 30 Nov 2005. The article focuses on the topics: Insulator (electricity).
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Citations
Patent
Method and device for electrostatically fixing substrates having a conductive layer
Christof Landesberger,Karlheinz Bock,Gerhard Klink +2 more
- 22 Mar 2007
TL;DR: In this paper, a method for handling a substrate having a conductive layer and a support having a planar electrode is described, where the substrate is fixed to the support by means of the effect of electrostatic attraction between the conductive layers and the planar electrodes.
3
Patent
Method and device for electrostatic fixing of substrates with polarized molecules
Christof Landesberger
- 22 Mar 2007
TL;DR: In this article, a method for handling a substrate with polarizable molecules including providing a carrier with a first junction electrode and disposing the substrate between the first junction and a second junction electrode is presented.
1
References
Patent
Low voltage electrostatic clamp for substrates such as dielectric substrates
Paul Kevin Shufflebotham,Michael S. Barnes +1 more
- 20 Dec 1996
TL;DR: An electrostatic clamp for dielectric substrates (12) is operated with a low voltage electric source by reducing the width of electrode lines (14) to less than 100 νm as discussed by the authors.
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Patent
Electrically conductive, transparent film for protection purposes
Ito Mamoru,Ikuo Mizoguchi,守 伊藤,郁夫 溝口 +3 more
- 28 May 1992
TL;DR: A π electron conjugate system conductive polymer layer 3 is formed on at least one surface of an insulating plastic base film 2, further a peelable adhesive layer 3 on the other surface of the base film so that the whole visible ray transmission exceeds 40% to give the conductive and transparent protecting film.
15
Patent
Preparation of conductive composite
Ito Mamoru,Katagawa Yoshiro,Kimura Masanori,Ikuo Mizoguchi,Sawachika Yasumasa,Tajima Hiroyuki +5 more
- 23 Oct 1986
TL;DR: In this article, a conductive composite comprising a material to be made conductive and an electron-conjugated polymer is obtained by polymerizing a monomer which has conjugated double bonds in its molecular structure and can be polymerized by oxidation in a treating liq.
12
Patent
Method for Electrostatically Attracting and Processing a Glass Insulative Substrate
Kitabayashi Tetsuo,Hiroaki Hori,Takeshi Uchimura,Noriaki Tateno,Fuwa Koh,Ken Maehira +5 more
- 25 May 2000
TL;DR: In this article, an electrostatic chuck for insulating substrate attraction, comprising a dielectric substrate acting on one surface thereof as an attraction surface of an insulating surface and provided on the other surface with a plurality of electrodes, is presented.
8
Patent
Liquid crystal display substrate
Yasuo Mizokoshi,泰男 溝腰 +1 more
- 20 Jan 1997
TL;DR: In this paper, the authors proposed to fix a substrate to a stage with sufficient strength even in a vacuum apparatus by using an electrostatic chuck by forming a conductive thin film or semiconductor thin film on the surface on the side opposite to the surface to be formed with liquid crystal patterns.
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