Journal Article10.1109/JMEMS.2006.883588
Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance
M.U. Demirci,Clark T.-C. Nguyen +1 more
170
TL;DR: In this article, the authors used a parallel array of corner-coupled polysilicon square plate resonators to achieve a motional resistance reduction of 5.9X.
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Abstract: Substantial reductions in vibrating micromechanical resonator series motional resistance Rx have been attained by mechanically coupling and exciting a parallel array of corner-coupled polysilicon square plate resonators. Using this technique with seven resonators, an effective Rx of 480 Omega has been attained at 70 MHz, which is more than 5.9X smaller than the 2.82 kOmega exhibited by a stand-alone transverse-mode corner-supported square resonator, and all this achieved while still maintaining an effective Q>9000. This method for Rx-reduction is superior to methods based on brute force scaling of electrode-to-resonator gaps or dc-bias increases, because it allows a reduction in Rx without sacrificing linearity, and thereby breaks the Rx versus dynamic range tradeoff often seen when scaling. This paper also compares two types of anchoring schemes for transverse-mode square micromechanical resonators and models the effect of support beam parameters on resonance frequency
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Citations
MEMS technology for timing and frequency control
Clark T.-C. Nguyen
- 29 Aug 2005
TL;DR: As vibrating RF MEMS devices are perceived more as circuit building blocks than as stand-alone devices, and as the frequency processing circuits they enable become larger and more complex, the makings of an integrated micromechanical circuit technology begin to take shape, perhaps with a functional breadth not unlike that of integrated transistor circuits.
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Micromachined Resonators: A Review
TL;DR: A review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators with references to the most influential contributions in the field for those interested in a deeper understanding of the material.
204
Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances
Amal Z. Hajjaj,Amal Z. Hajjaj,Nizar Jaber,Nizar Jaber,Saad Ilyas,Feras K. Alfosail,Mohammad I. Younis +6 more
TL;DR: An overview is presented of the various used dynamical approaches to enhance the sensitivity of resonators for sensing applications and analytical approaches that have been developed to better understand and investigate the dynamical behavior of M/NEMS resonators on the multiple time scales.
MEMS Resonators for Frequency Reference and Timing Applications
TL;DR: An overview of microelectromechanical systems (MEMS) resonators for frequency reference and timing applications is presented in this article, where state-of-the-art technologies for improving the overall performance of MEMS resonators, such as quality factor, motional impedance, temperature sensitivity, and initial frequency uniformity, are reviewed in detail.
105
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